Hydrogen gas sensing using aluminum doped ZnO metasurfaces

Abstract

<p>Hydrogen (H₂) sensing is crucial in a wide variety of areas, such as industrial, environmental, energy and biomedical applications. In this work, aluminum-doped zinc oxide (AZO) nanotubes are reported for optical hydrogen sensing.</p>

Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths

“…41 ALD is a well-known technique that allows to obtain high-quality films with precise thickness control. 42 ALD deposition has been successfully applied for the fabrication of different high aspect ratio nanostructures with various materials, such as Al 2 O 3 , TiO 2 , 43 Al-doped ZnO trenches, [44][45][46] pillars, 47 and tubes, 48 TiN trenches 49 and tubes, 50 multi-compound coaxial tubes. 51 However, conventional thermal ALD requires temperatures higher than 400 • C that above the trimethylaluminum (TMA) decomposition temperature.…”

Microfluidic integrated gas sensors for smart analyte detection: a comprehensive review

“…In another study, Chatterjee et al have developed an optical hydrogen gas sensor utilizing aluminum-doped zinc oxide (AZO) nanotubes inside a microchannel. After exposing their sensor to hydrogen gas at room temperature and pressure, a considerable shift in the wavelength and reduction in the reflectance intensity is reported ( Chatterjee et al, 2020 ).…”

Surface Functionalization and Texturing of Optical Metasurfaces for Sensing Applications

“…For example, Chatterjee et al fabricated a metasurface comprising aluminum-doped zinc oxide nanopillars with either a solid or hollow structure on a SiO 2 layer. 200 The hollow nanopillar structure enabled hydrogen gas sensing down to 0.7% with a response time of 10 min. The authors also performed ellipsometric reflection measurements in the NIR range and reported wavelength shifts of up to 13 nm upon exposure to hydrogen gas at room temperature.…”

“…While metal oxides can be used as dielectric media as explained earlier in this review, these materials can also be applied to metasurface texturing using nanostructuring methodologies to enhance their sensing properties. For example, Chatterjee et al fabricated a metasurface comprising aluminum-doped zinc oxide nanopillars with either a solid or hollow structure on a SiO 2 layer . The hollow nanopillar structure enabled hydrogen gas sensing down to 0.7% with a response time of 10 min.…”