Hybrid Numerical Simulation of Micro Electro Mechanical Systems

Greiff, M.; Bala, Uzzal Binit; Mathis, Wolfgang

doi:10.2529/piers050907123514

Cited by 5 publications

(3 citation statements)

References 4 publications

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“…Compared with the a priori approximation (22), ε 1,n is assumed to be more accurate, since (25) incorporates (a priori calculated) first-order partial derivatives. Making use of the error estimator ε 1,n , the number of FE-subsystem computations may be reduced.…”

Section: Reduction Of Fe-subsystem Computations In the Semi-implicit mentioning

confidence: 99%

Coupled simulation of multibody and finite element systems: an efficient and robust semi-implicit coupling approach

Busch

Schweizer

2011

Arch Appl Mech

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Standard coupling approaches for simulating coupled MBS/FEM systems may entail enormous CPU times in order to achieve a stable and accurate solution. To stabilize and speed up the solution process, semi-implicit coupling approaches can be applied successfully. In literature, semi-implicit coupling approaches have been introduced, where Jacobian information is exchanged between the subsystems using partial derivatives with respect to the state vectors of the subsystems. The drawback of these methods is that the numerical calculation of the Jacobians with respect to the whole state vector of the subsystems is very time-consuming.The key idea of the semi-implicit coupling technique presented here is to reduce the computational effort by using Jacobian information only with respect to the coupling variables.The semi-implicit coupling technique introduced here is exemplarily applied for coupling a commercial MBS code with a commercial FEM code. As a practical example, we consider a hybrid nonlinear rotor/bearing model of a high-speed turbine. The rotor is modeled as a flexible multibody system. For calculating the bearing reactions, a finite element discretization of Reynolds fluid film equation is applied which yields the pressure distribution in the fluid films of the hydrodynamic bearings. Both codes are coupled via interprocess communication (IPC). A very time-efficient implementation of the semi-implicit coupling approach can be accomplished by a parallelization on multiple CPUs.

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Section: Reduction Of Fe-subsystem Computations In the Semi-implicit mentioning

confidence: 99%

Coupled simulation of multibody and finite element systems: an efficient and robust semi-implicit coupling approach

Busch

Schweizer

2011

Arch Appl Mech

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“…The energy related functional in the electrostatic calculation domain Ω can be written as (Greiff et al , 2006): Equation 1 where u ( a 1 , a 2 , … , a m , x , y ) is an approximation of the potential u ( x, y ). In the present case the boundary integral of equation (1) is zero.…”

Section: Numerical Formulationmentioning

confidence: 99%

Numerical modelling of electrostatic force microscopes considering charge and dielectric constant

Bala

Greiff

Preisner

et al. 2009

COMPEL - The International Journal for Computation and Mathematics in Electrical and Electronic Engineering

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PurposeThe purpose of this paper is to present a hybrid numerical simulation approach for the calculation of potential and electric field distribution considering charge and dielectric constant.Design/methodology/approachEach numerical method has its own advantages and disadvantages. The idea is to overcome the disadvantages of the corresponding numerical method by coupling with other numerical methods. An augmented finite element method (FEM), linear FEM and boundary element method are used with an efficient coupling.FindingsThe simulation model of microstructured devices is not so simple. During the simulation various types of problems will occur. It is found that by using several numerical methods these problems can be overcome and the calculation can be performed efficiently.Research limitations/implicationsThe present approach can be applied in 2D cases. But, in 3D cases the calculation of augmented FEM in a spherical coordinate becomes quite elaborate.Practical implicationsThe proposed hybrid numerical simulation approach can be applied for the simulation of the electrostatic force microscope (EFM) which is a very high‐resolution measuring tool in nanotechnology. This approach can be applied also to other micro‐electro‐mechanical systems.Originality/valueSince the scanning process of the EFM is dynamic, it requires the updating of the FEM mesh in each calculation time step. In the present paper, the mesh updating is achieved by an arbitrary Lagrangian‐Eulerian (ALE) method. The proposed numerical approach can be applied for the simulation of the EFM including this remeshing algorithm ALE.

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“…This process can not be coupled directly by material laws or similar so the coupling is handled in a staggered sense: The forces resulting from the electrostatic field are used as boundary conditions for the mechanical simulation, the displacements resulting from this calculation are returned as mesh update in the electrostatic field simulation. The electrostatic field simulation is calculated using a FEM-BEM coupling and the method of fundamental solution [3], while the bending and the displacement calculation of the cantilever is done with the coupled van der Waals force formulation. …”

Section: External Electrostatic Fieldmentioning

confidence: 99%

Numerical Simulation of Surface Scanning in an Atomic Force Microscope Environment

Helmich

Nackenhorst

2006

Proc Appl Math and Mech

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In this contribution a model for the numerical simulation of an atomic force microscope (AFM) is presented. A challenge of this goal is the treatment of the multiphysics phenomena on the microscopic length-scale. Hence a coupled strategy is required to incorporate the different physically aspects and their interactions. The strategy is embedded in a nonlinear finite element formulation, where the different aspects are tackled by direct and weak coupling.

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Hybrid Numerical Simulation of Micro Electro Mechanical Systems

Cited by 5 publications

References 4 publications

Coupled simulation of multibody and finite element systems: an efficient and robust semi-implicit coupling approach

Coupled simulation of multibody and finite element systems: an efficient and robust semi-implicit coupling approach

Numerical modelling of electrostatic force microscopes considering charge and dielectric constant

Numerical Simulation of Surface Scanning in an Atomic Force Microscope Environment

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