2018 IEEE Symposium on VLSI Technology 2018
DOI: 10.1109/vlsit.2018.8510668
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Hybrid 14nm FinFET - Silicon Photonics Technology for Low-Power Tb/s/mm2 Optical I/O

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Cited by 34 publications
(18 citation statements)
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“…Compared to the TW-MZMs, their energy efficiency can be improved by 10-100 times and down to the fJ/bit level [159,160]. Bandwidth densities of over 1 Tb/s/ mm 2 have been demonstrated using WDM MRM hybrids integrated with 14 nm FinFET [161]. In addition, MRMs can work simultaneously as MUX and modulators, thus greatly simplifying WDM transmitters [162,163].…”
Section: Ultracompact Low-power Devicesmentioning
confidence: 99%
“…Compared to the TW-MZMs, their energy efficiency can be improved by 10-100 times and down to the fJ/bit level [159,160]. Bandwidth densities of over 1 Tb/s/ mm 2 have been demonstrated using WDM MRM hybrids integrated with 14 nm FinFET [161]. In addition, MRMs can work simultaneously as MUX and modulators, thus greatly simplifying WDM transmitters [162,163].…”
Section: Ultracompact Low-power Devicesmentioning
confidence: 99%
“…The most common types of flip chip bumps (FC bumps) are copper pillars and microsolder bumps. Copper pillars between PICs and EICs have been demonstrated with parasitic capacitances below 30 fF, parasitic resistances below 1 Ω, and neglible parasitic inductance [31]. Microsolder bumps between PICs and EICs have been demonstrated with parasitic capacitances below 25 fF and parasitic resistances below 1 Ω [32].…”
Section: D Integrationmentioning
confidence: 99%
“…Microsolder bumps between PICs and EICs have been demonstrated with parasitic capacitances below 25 fF and parasitic resistances below 1 Ω [32]. Microsolder bumps and copper pillars in transceiver MCMs have achieved similarly dense pitches-in the range of 40 µm to 50 µm [31], [32], [33]. Microsolder bumps and copper pillars are expected to be able to reach pitches of 20 µm and 10 µm, respectively [34].…”
Section: D Integrationmentioning
confidence: 99%
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