2015
DOI: 10.1109/jsen.2014.2345575
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Abstract: In this paper, we report on the development of a highly sensitive, relatively low-temperature ethanol sensor based on sol-gel derived p-TiO 2 thin film. The p-type anatase TiO 2 thin film was deposited by sol-gel technique on a thermally oxidized <100> p-Si (resistivity 5 cm) substrate. Anatase TiO 2 phase with <101> nanocrystallinity was confirmed with an average particle size of ∼11 nm from X-ray diffraction and field emission scanning electron microscopic study. Ethanol sensor study, in the resistive mode, … Show more

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Cited by 47 publications
(19 citation statements)
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References 33 publications
(43 reference statements)
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“…2. The 10-12-nm particle size of the sol-gel derived p-TiO 2 was confirmed from SEM image (not shown), which ensured that these particles penetrate well within the nanotubes as well as within the intertubular separations [13].…”
Section: Methodsmentioning
confidence: 69%
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“…2. The 10-12-nm particle size of the sol-gel derived p-TiO 2 was confirmed from SEM image (not shown), which ensured that these particles penetrate well within the nanotubes as well as within the intertubular separations [13].…”
Section: Methodsmentioning
confidence: 69%
“…Both the undoped (also called not intentionally doped) p-type TiO 2 nanoparticle layer and the n-type TiO 2 nanotube layer synthesis technique were reported in detail in [10], [11], [13], and [14]. n-type rutile TiO 2 (including some anatase percentage) thin film was developed by thermal oxidation of Ti foil (99.5% pure, thickness: 0.25 mm) at 600°C for 2 h in 50 sccm flow of high-purity (XL grade) oxygen.…”
Section: Methodsmentioning
confidence: 99%
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“…Substantially, 20 ml of de-ionized water was added to the solution and stirred for one hour. The solution was kept in dark for 24 hours for further nucleation of p-TiO 2 nanoparticles [5].…”
Section: Methodsmentioning
confidence: 99%