High throughput low cost closed field magnetron sputter deposition of durable reflectors based on dielectric overcoated metal for application in non-dispersive infrared gas sensors

Oliver, Greig; Pomfret, Jonathan; Gibson, D. R.; Fleming, Lewis; Ahmadzadeh, Sam; Mcgann, Greg; Song, Shigeng; Navabpour, Parnia; Sun, Hui; MacKay, Peter

doi:10.1364/oic.2022.wd.4

Optical Interference Coatings Conference (OIC) 2022 2022

DOI: 10.1364/oic.2022.wd.4

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High throughput low cost closed field magnetron sputter deposition of durable reflectors based on dielectric overcoated metal for application in non-dispersive infrared gas sensors

Greig Oliver¹,

Jonathan Pomfret²,

D. R. Gibson³

et al.

Abstract: Optical & mechanical properties of closed-field magnetron pulsed DC sputter deposited Al, Au & Ag with Al2O3 protective layer are presented. Results show optical & durability performance suitable for use within NDIR optical gas sensors.

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High throughput low cost closed field magnetron sputter deposition of durable reflectors based on dielectric overcoated metal for application in non-dispersive infrared gas sensors

Abstract: Optical & mechanical properties of closed-field magnetron pulsed DC sputter deposited Al, Au & Ag with Al2O3 protective layer are presented. Results show optical & durability performance suitable for use within NDIR optical gas sensors.

Cited by 0 publications

References 5 publications

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