Abstract. This paper reports on a new method for estimation and minimization of mechanical stress on MEMS sensor and actuator structures due to packaging processes based on flip chip technology. For studying mechanical stress a test chip with silicon membranes was fabricated. A network of piezo-resistive solid state resistors created by diffusion was used to measure the surface tension pattern between adjacent membranes. Finite element method simulation was used to calculate the stress profile and to determine the optimum positions for placing the resistive network.Keywords: Thermo mechanical stress, Micro electromechanical systems (MEMS), Packaging.
IntroductionMicrosystems technology spreads out rapidly over many other engineering fields, such as chemical and biological process engineering. This constantly draws a need for new, adapted packaging processes according to their application [1]. Otherwise, these customized solutions are generating enormous rising costs, which are defrayed only with difficulty. In order to fulfill the requirements on high quality and reliability negative effects caused by packaging should be analyzed and characterized early during the design phase. Currently, these are reduced afterwards by external circuiting and signal processing, but are not entirely compensated [2]. In this contribution a new method is presented for the estimation and minimization of mechanical stresses caused by packaging processes. Thermo mechanical loads often affect the operability of micro system components. We will concentrate on thermo mechanical aspects of packaging of MEMS starting from the investigations of mechanical deformation by packaging processes. Requirements on related material laws and material data for model based simulation are pointed out. Afterwards, the test chip (Figure 1) is introduced for predicting the influence of packaging processes on the accuracy of a micromechanical pressure sensor with the help of finite element analysis (FEA). With pressure sensors packaging of MEMS over a wide temperature range causes impairments on the long-term and drift behavior. Finally, a procedure for the test chip fabrication is proposed that focuses on the membrane with sensor elements in particular, as well as on related electrical structures.