High frequency piezoelectric MEMS ultrasound transducers

Mina, I.G.; Kim, Hyunsoo; Kim, In-Soo; Park, Sung Kyu; Choi, Kyusun; Jackson, Thomas N.; Tutwiler, Richard L.; Trolier-McKinstry, Susan

doi:10.1109/tuffc.2007.555

Cited by 55 publications

(36 citation statements)

References 17 publications

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“…To study the characteristic of the ultrasound transducer and the electrical impedance at different frequencies, the frequency of the excitation signal is adjusted to 39 kHz and 60 kHz. The voltage across transducer and the current through it are measured to calculate its electrical impedance using (4). (4) where is the resonant frequency of the transducer.…”

Section: 2using a Sinusoidal Signalmentioning

confidence: 99%

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Dissimilar trend of nonlinearity in ultrasound transducers and systems at resonance and non-resonance frequencies

et al. 2017

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Abstract-Several factors can affect performance of an ultrasound system such as quality of excitation signal and ultrasound transducer behaviour. Nonlinearity of piezoelectric ultrasound transducers is a key determinant in designing a proper driving power supply. Although, the nonlinearity of piezoelectric transducer impedance has been discussed in different literatures, the trend of the nonlinearity at different frequencies with respect to excitation voltage variations has not been clearly investigated in practice. . In this paper, to demonstrate how the nonlinearity behaves, a sandwich piezoceramic transducer was excited at different frequencies. Different excitation signals were generated using a linear power amplifier and a multilevel converter within a range of 30 V-200V. Empirical relation was developed to express the resistance of the piezoelectric transducer as a nonlinear function of both excitation voltage and resonance frequency. The impedance measurements revealed that at higher voltage ranges, the piezoelectric transducer can be easily saturated. Also, it was shown that for the developed ultrasound system composed of two transducers (one transmitter and one receiver), the output voltage measured across receiver is a function of a voltage across the resistor in the RLC branches and is related to the resonance frequencies of the ultrasound transducer. Index TermsHigh power ultrasound transducer, nonlinear behaviour, ultrasound system excitation, power electronic converters Dissimilar trend of nonlinearity in ultrasound transducers and systems at resonance and non-resonance frequencies 2

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Section: 2using a Sinusoidal Signalmentioning

confidence: 99%

“…In such a system, a high power ultrasound transducer converts electrical energy to mechanical energy (ultrasound wave) and vice versa [1][2][3][4][5][6][7]and the transducers can be employed as transmitters, receivers or both. As shown in Fig.…”

Section: Introductionmentioning

confidence: 99%

Dissimilar trend of nonlinearity in ultrasound transducers and systems at resonance and non-resonance frequencies

et al. 2017

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“…Then, by using the moment equilibrium, the bending stress of a composite beam is expressed as Eq (7) and the relationship between the bending stress and the radius curvature can be used as Eq (8). Then, by combining two equations, Eq (9) is obtained.…”

Section: Theorymentioning

confidence: 99%

“…Piezoelectric energy harvesting systems are now considered to be a suitable independent power source for lowpower sensors for micro scale [1][2][3][4][5][6][7][8] and nano scale [9,10].…”

Section: Introductionmentioning

confidence: 99%

Study on improving current generating time of piezoelectric energy harvesting system

et al. 2014

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This study combined a ceramic, metal alloy, and polymer in a piezoelectric energy harvesting system. The proper container film for curing the urethane rubber was determined to be a Si-coated polyester film. Furthermore, a technique was developed to embed a piezoelectric energy system in urethane rubber (soft and hard); the resulting effects on the output voltage generation of this system were experimentally determined. Comparing the uncoated and hard urethane rubber-coated systems, the latter system improved the energy generation time by a factor of 50 by restricting the recovery time of the metal alloy and storing applied mechanical energy in urethane rubber, providing more time for the piezoelectric ceramic to generate output current. From the LED lighting test results, the urethane rubber coating increased the usable voltage generating time from 0.05 s to 2.5 s. The improved generating time is useful for piezoelectric energy harvesting systems with irregular ambient energy sources.

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“…Griggio et al [3] accelerometers [4] and ultrasonic transducers [5,6] to name a few. From a medical standpoint, there are numerous potential applications for low voltage, small form-factor devices that perform the same family of functions as larger devices.…”

Section: /[512]mentioning

confidence: 99%

Medical Applications of Piezoelectric Microelectromechanical Systems

Griggio

Kim

Ural

et al. 2013

Integrated Ferroelectrics

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Bulk piezoelectric ceramics and single crystals are widely used in medical applications, including medical ultrasonic imaging, therapeutic ultrasound, and drug delivery. This paper reviews possibilities for thin film micromachined components as alternatives to the bulk devices. Particular emphasis is placed on the development of a CMOScompatible ultrasound system. For this purpose, a piezoelectric ultrasound system on a Si substrate was fabricated using a diaphragm geometry transducer with PZT films. A 1-D array of 8 elements was designed and fabricated using 4 photolithography steps. Cavities under the resonating elements were obtained by XeF 2 etching from the top-side of the wafer. Capacitance and admittance spectra showed a resonance at ∼ 42 MHz for the fabricated structures with a quality factor of 2.1, this resonance was higher than the one predicted by the natural frequency equation for circular plate. Catch-and pitch-mode tests were performed in water. Sensing and actuating functionalities were demonstrated for the fabricated devices, with collected signals of 40 mV peak-to-peak at a distance of 7.2 mm during the catch-mode test and amplitudes as high as 15 mV peak-to-peak at a distance of 7.4 mm during the pitch-mode test. A bandwidth of 83% was calculated during pitch-mode test.

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High frequency piezoelectric MEMS ultrasound transducers

Cited by 55 publications

References 17 publications

Dissimilar trend of nonlinearity in ultrasound transducers and systems at resonance and non-resonance frequencies

Dissimilar trend of nonlinearity in ultrasound transducers and systems at resonance and non-resonance frequencies

Study on improving current generating time of piezoelectric energy harvesting system

Medical Applications of Piezoelectric Microelectromechanical Systems

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