2018
DOI: 10.1364/oe.26.027965
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High-density gas capillary nozzles manufactured by hybrid 3D laser machining technique from fused silica

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Cited by 21 publications
(14 citation statements)
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“…However, machining such a complicated nozzle geometry, including micrometer scale features, is technologically demanding. In practice, the nozzle was made using nanosecond laser rear-side processing and the femtosecond laser-assisted selective etching technique (FLSE, [32,33]) which consists of chemical etching of previously selectively laser-irradiated fused silica. 3D computational fluid dynamics (CFD) simulations were realized with the software ANSYS Fluent to validate and optimize the design.…”
Section: A One-sided Shock Nozzlementioning
confidence: 99%
“…However, machining such a complicated nozzle geometry, including micrometer scale features, is technologically demanding. In practice, the nozzle was made using nanosecond laser rear-side processing and the femtosecond laser-assisted selective etching technique (FLSE, [32,33]) which consists of chemical etching of previously selectively laser-irradiated fused silica. 3D computational fluid dynamics (CFD) simulations were realized with the software ANSYS Fluent to validate and optimize the design.…”
Section: A One-sided Shock Nozzlementioning
confidence: 99%
“…All nozzle frames were fabricated using the nanosecond laser and a rear-side or bottom-up machining approach alone, which allowed a high material removal rate 29,52 . However, depending on the design, some of the inner channels were fabricated in combination with the front-side laser ablation.…”
Section: Methodsmentioning
confidence: 99%
“…At the modest pressure of 20–60 bar fused silica nozzles ensure significantly longer operation times than metallic or polymeric nozzles. Laser-assisted hybrid microfabrication technique 29 , 30 of fused silica allows the formation of centimetre-size frame and channels of the diameter less than 40 μm with the surface roughness < 1 μm from a single block. The formation quality exceeds the precision of 3D printing 31 and electro-erosion technique 32 .…”
Section: Introductionmentioning
confidence: 99%
“…Here, two different types of gas jets are characterizeda rotationally symmetric gas jet produced by a cylindrical nozzle with de Laval shape, shown in Figure 2 (A) and an elongated jet produced by a 5 mm × 1 mm slit nozzle with de Laval shape along the long side and straight walls along the short side as shown in Figure 2 (B). The slit nozzle was fabricated from fused silica via the bottom-up milling approach using nanosecond laser [28], [29]. This technique allowed the precise 2.5D processing with high material removal rate reaching 0.07 mm 3 /s for the inner converging-diverging channel with only a 1.7 W average laser power.…”
Section: Gas Nozzles For Lpa Experimentsmentioning
confidence: 99%