2003
DOI: 10.1088/0957-0233/14/12/011
|View full text |Cite
|
Sign up to set email alerts
|

High-accuracy optical measurement of flatness for large objects

Abstract: HAL is a multidisciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. L'archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d'enseignement et de recherche français ou étrangers, des labora… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
0
0

Year Published

2004
2004
2022
2022

Publication Types

Select...
4
2

Relationship

0
6

Authors

Journals

citations
Cited by 8 publications
(1 citation statement)
references
References 11 publications
0
0
0
Order By: Relevance
“…The flatness of a flat surface can be measured traditionally by a coordinate measuring machine or by an electronic level. Some non-contact flatness measurement systems with the help of an image processing system, have been developed by projecting a parallel beam or the structured fringes on to the test specimen, and then analyzed by the developed software based on the triangulation principle or the phase shifting methodology [2][3][4]. The stylus instrument and the light scattering method are mainly used to measure the surface roughness.…”
Section: Introductionmentioning
confidence: 99%
“…The flatness of a flat surface can be measured traditionally by a coordinate measuring machine or by an electronic level. Some non-contact flatness measurement systems with the help of an image processing system, have been developed by projecting a parallel beam or the structured fringes on to the test specimen, and then analyzed by the developed software based on the triangulation principle or the phase shifting methodology [2][3][4]. The stylus instrument and the light scattering method are mainly used to measure the surface roughness.…”
Section: Introductionmentioning
confidence: 99%