2002
DOI: 10.1038/nmat789
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Hierarchical structure formation and pattern replication induced by an electric field

Abstract: Several techniques based on soft lithography have emerged to replicate micrometre-sized patterns. Similar to most other lithographic methods, these techniques structure a single layer of photo resist. For many applications, however, it is desirable to control the spatial arrangement of more than one component. With traditional methods, this requires an iterative, multistep procedure, making the replication process more complex and less reliable. Here, a replication process is described where multiple materials… Show more

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Cited by 263 publications
(264 citation statements)
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“…Such occurrence, for high aspect-ratio features, would prevent the achievement of the expected final steady state. The EHD lithography is usually performed at temperatures above the glass transition of the polymer film [typically polystyrene or poly (methyl methacrylate)], obtaining permanent microstructures by slow annealing and successive cooling, taking hours (10)(11)(12)(13).…”
mentioning
confidence: 99%
“…Such occurrence, for high aspect-ratio features, would prevent the achievement of the expected final steady state. The EHD lithography is usually performed at temperatures above the glass transition of the polymer film [typically polystyrene or poly (methyl methacrylate)], obtaining permanent microstructures by slow annealing and successive cooling, taking hours (10)(11)(12)(13).…”
mentioning
confidence: 99%
“…[ 16 ] Here, we have applied this principle to polymer trilayers in our HEHD approach. The structure formation in a multilayer fi lm can be controlled by carefully designing the layer sequence.…”
Section: Resultsmentioning
confidence: 99%
“…To define the number, position, and distances of the objects on a surface, it is often necessary to direct their assembly by means of suitable prepatterned substrates or stamps. Nanopatterned surfaces have been fabricated by nanoimprinting (Wang et al, 1999), contact printing (Kumar & Whitesides, 1993;Xu et al, 2007), microtransfer molding (Zhao et al, 1996), pattern replication induced by an electric field (Morariu et al, 2003), lithographically induced self-construction , grid-assisted self-organization (Cavallini et al, 2002), and self-assembly among others. Most of these techniques rely on a soft mould or stamp (Quake & Sherer, 2000).…”
Section: Introductionmentioning
confidence: 99%