2017
DOI: 10.1038/nphoton.2017.120
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Heterogeneously integrated III–V/Si MOS capacitor Mach–Zehnder modulator

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Cited by 137 publications
(84 citation statements)
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“…[106]). Similarly, an InGaAsP membrane bonded on 10 nm SiO 2 on an n-doped Si waveguide core has both high modulation efficiency and high speed [105]. With this configuration, a 3 dB modulation bandwidth of 2 GHz and a data rate of 32 Gb s −1 with V π L = 0.9 V mm were reported [105].…”
Section: Graphene-based Modulatorsmentioning
confidence: 96%
See 3 more Smart Citations
“…[106]). Similarly, an InGaAsP membrane bonded on 10 nm SiO 2 on an n-doped Si waveguide core has both high modulation efficiency and high speed [105]. With this configuration, a 3 dB modulation bandwidth of 2 GHz and a data rate of 32 Gb s −1 with V π L = 0.9 V mm were reported [105].…”
Section: Graphene-based Modulatorsmentioning
confidence: 96%
“…In Fig. 3b, we compare the FOM of graphene modulators with those of p-n junction Si modulators, Si-insulator-Si modulators [104] (black curve) and InGaAsP membranes on Si (refs [105,106]). The points are experimental data taken from literature, whereas the lines are theoretical estimations for optimized modulator parameters.…”
Section: Graphene-based Modulatorsmentioning
confidence: 99%
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“…A variety of EO-functional materials, such as graphene 24,25 , III-V materials 26 and transparent conductive oxides (TCO) 27,28 have been investigated for EO modulation. Here we select Indiumtin-oxide (ITO) as the EO material and integrate an ITO-oxide-ITO capacitive gate-stack atop a silicon photonic waveguide to form an all-photonic optical mode.…”
Section: Introductionmentioning
confidence: 99%