2005
DOI: 10.1021/ed082p1361
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Hands-on Classroom Photolithography Laboratory Module To Explore Nanotechnology

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Cited by 4 publications
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“…Because UV radiation is being used to change the solubility of a chemical, PμSL could be considered a form of maskless photolithography that is capable of producing true 3D objects . In this case, the mask is replaced by a black background from the projector.…”
Section: Chemical Considerationsmentioning
confidence: 99%
“…Because UV radiation is being used to change the solubility of a chemical, PμSL could be considered a form of maskless photolithography that is capable of producing true 3D objects . In this case, the mask is replaced by a black background from the projector.…”
Section: Chemical Considerationsmentioning
confidence: 99%
“…They further state that laboratory exercises demonstrating nanofabrication techniques have not been developed extensively due to the expense and expertise necessary to implement these laboratories . There are some undergraduate-level nanofabrication laboratory exercises involving photolithography; , however, the issue of cost resurfaces because expensive materials are needed for the photolithography experiments. Another report mentions the need for an additional piece of specialty equipment, such as an optical reducer, for college-level photolithography laboratory exercises .…”
mentioning
confidence: 99%
“…Traditionally, soft lithographic patterning is performed on conductive gold films prepared by electron beam evaporation (8,10) or by thermal evaporation (11) using potassium cyanide (KCN) as the etchant on gold films, which is a regulated material deemed too hazardous for undergraduate experimentation. Papers published in this Journal include photolithography utilizing UV light sources (12)(13)(14)(15)(16) and soft lithography on a gold archival CD that uses a commercial, cyanide-free gold etchant (17).…”
mentioning
confidence: 99%