Superlattices and Microstructures volume 44, issue 6, P742-753 2008 DOI: 10.1016/j.spmi.2008.08.001 View full text
Ding-Yeng Chen, Chun-Yao Hsu

Abstract: a b s t r a c tGallium-doped zinc oxide films have been grown on glass substrates with and without ZnO buffer layers by r.f. magnetron sputtering at room temperature. In this approach, the grey relational Taguchi method analysis is adopted to solve the coating process with multiple deposition qualities. Optimal coating parameters can then be determined by using the gray relational grade as a performance index. The GZO coating parameters (r.f. power, sputtering pressure, O 2 /(Ar + O 2 ) flow-rate ratios, and …

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