DOI: 10.1109/isscc.1981.1156249
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Abstract: ONE OF THE MOST INTERESTING features of 12L is the possibility of realizing complex digital and analog circuitry on the same chip using the same processing schedule. Unfortunately, there are fundamental process tradeoffs between analog breakdown voltage and I2 L speed which have impeded the combination of high speed 12L and high-voltage analog transistors on the same chip. Several approaches have been d e~c r i b e d~-~ using one or more additional processing steps to increase the I L speed of a standard high…

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