Fully integrated micro electromagnetic vibration energy harvesters with micro-patterning of bonded magnets

Tao, Kai; Ding, Guifu; Wang, P.; Yang, Zhuoqing; Wang, Y.

doi:10.1109/memsys.2012.6170413

Cited by 22 publications

(10 citation statements)

References 11 publications

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“…To further reduce the resonant frequency, possible methods are adding proof mass on the cantilever, modifying the coil structure, or making the cantilever thinner. Conventional semiconductor processes use sputtering, electroplating, laser micromachining, or E-beam evaporating [20][21][22][23][24][25][26][27] to make conductive coils. In this work, we used a conductive direct-write method with silver ink to fabricate the conductive structures.…”

Section: Discussionmentioning

confidence: 99%

Development of a Vibration-Based Electromagnetic Energy Harvester by a Conductive Direct-Write Process

Feng

Chen

2017

Energies

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A conductive direct-write process of multilayered coils for micro electromagnetic generators is proposed. This novel approach of using silver ink to form the conductive structures largely reduces the fabrication complexity, and it provides a faster alternative to the conventional semiconductor methods. Multi-layered coils with insulation were accurately layered on a micro-machined cantilevered diaphragm by a dispenser. Coils several layers thick could be used to increase the power output and double coils were separated by a layer of insulation. Six prototypes, all capable of efficient conversion of vibrational energy into electrical energy, were fabricated. The experimental results, which include measurements of the electromotive force and power output, are presented. Prototypes with two coils and thicker conducting layers had less resistance and the power output was much more than that of a single-coil unit. This generator can produce 82 nW of power at a resonance frequency of 275 Hz under 5 g excitation.

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Section: Discussionmentioning

confidence: 99%

Development of a Vibration-Based Electromagnetic Energy Harvester by a Conductive Direct-Write Process

Feng

Chen

2017

Energies

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“…There are four available magnets: ceramic, Alnico, SmCo, and NdFeB, among these, NdFeB has the largest magnetic field intensity, high coercive force, and no demagnetization due to the vibration of generator [7]. [9]. This study offers a solution of the micro electromagnetic harvester fully integrated with MEMS fabrication technology, although the produced energy is very limited.…”

Section: Electromagneticmentioning

confidence: 99%

Current Developments of Energy Scavenging, Converting and Storing in WSNs

Bhaskar¹,

Champawat²,

Bhaskar³

2015

IJCA

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Wireless sensor networks (WSNs) design requires multidisciplinary approach in the field of wireless communication, embedded systems, networking, digital signal processing, hardware and software engineering. Major factors to influence the WSNs design are hardware and software constraints, scalability, cost, transmission media, network topology and power consumption etc. Most of WSN nodes are battery powered. With the limited capacity of batteries to power WSN nodes, need of energy harvester or scavenger is required to harvest or scavenge energy from the environment to improve the life-time of the sensor node. The harvested or scavenged energy is converted by power converters to recharge the sensor nodes or for the storage devices. This paper gives current developments of energy harvesting technologies, power converters and storage devices proposed by various researchers in WSNs along with some open research problems.

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“…In the first case, the piezoelectric effect is exploited to extract electricity from the mechanical vibration of a suspended proof mass (Erturk and Inman 2011). In electromagnetic scavengers, instead, the oscillation of a permanent magnet induces an electric current into a coil (Tao et al 2012). Finally, the electrostatic transduction is based on charge displacement in two capacitor electrodes in relative movement to each other (Liu et al 2012;Iannacci et al 2013b;Solazzi et al 2011).…”

Section: Introductionmentioning

confidence: 99%

“…permanently charged/polarised dielectric layers (Hagiwara et al 2012;Suzuki et al 2011). Finally, miniaturised electromagnetic EHs, previously considered to be not successful because of scaling issues (Cugat et al 2003), recently started to benefit from the development of efficient techniques for patterning (Miki et al 2012) and bonding (Tao et al 2012) of thin layers with improved magnetic properties, increasing the magnet-to-coil coupling, and, in turn, the EHs performance.…”

Section: Introductionmentioning

confidence: 99%

MEMS-based multi-modal vibration energy harvesters for ultra-low power autonomous remote and distributed sensing

et al. 2018

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In this contribution, we discuss the implementation of a novel microelectromechanical-systems (MEMS)-based energy harvester (EH) concept within the technology platform available at the ISAS Institute (TU Vienna, Austria). The device, already presented by the authors, exploits the piezoelectric effect to convert environmental vibrations energy into electricity, and presents multiple resonant modes in the frequency range of interest (i.e. below 10 kHz). The experimental characterisation of a sputter deposited aluminium nitride piezoelectric thin-film layer is reported, leading to the extraction of material properties parameters. Such values are then incorporated in the finite element method model of the EH, implemented in Ansys Workbench TM , in order to get reasonable estimates of the converted power levels achievable by the proposed device solution. Multiphysics simulations indicate that extracted power values in the range of several lW can be addressed by the EH-MEMS concept when subjected to mechanical vibrations up to 10 kHz, operating in closed-loop conditions (i.e. piezoelectric generator connected to a 100 kX resistive load). This represents an encouraging result, opening up the floor to exploitations of the proposed EH-MEMS device in the field of wireless sensor networks and zeropower sensing nodes.

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Fully integrated micro electromagnetic vibration energy harvesters with micro-patterning of bonded magnets

Cited by 22 publications

References 11 publications

Development of a Vibration-Based Electromagnetic Energy Harvester by a Conductive Direct-Write Process

Development of a Vibration-Based Electromagnetic Energy Harvester by a Conductive Direct-Write Process

Current Developments of Energy Scavenging, Converting and Storing in WSNs

MEMS-based multi-modal vibration energy harvesters for ultra-low power autonomous remote and distributed sensing

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