1997
DOI: 10.1021/jp963322r
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FTIR Study of the Oxidation of Porous Silicon

Abstract: The oxidation of hydrogen-terminated porous silicon surfaces produced by electrochemical etching has been studied using transmission FTIR spectroscopy. The surface is passivated to oxidation by surface hydrogen below about 523 K. Above this temperature as hydrogen depletion occurs by H2 evolution, Si surface dangling bond sites, capable of O2 dissociation, are involved in initiating the first stage of oxidation. Two reactions are observed. The first, O insertion into Si−Si back-bonds, leads to −O y SiH x surf… Show more

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Cited by 324 publications
(297 citation statements)
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“…The spectrum of the SiNW before the HF-dip includest he broad modes of SiÀOÀSi around 1020 cm À1 and d(O y SiÀH x )a t8 75 cm À1 . [25] After the HF-dip the SiNW are hydrogen terminated without any traces of oxide species. The characteristic SiÀH x bands are located around 2100 and 913 cm À1 .…”
Section: Functionalization Of Porous Silicon Nanowires With Acrylic Acidmentioning
confidence: 99%
“…The spectrum of the SiNW before the HF-dip includest he broad modes of SiÀOÀSi around 1020 cm À1 and d(O y SiÀH x )a t8 75 cm À1 . [25] After the HF-dip the SiNW are hydrogen terminated without any traces of oxide species. The characteristic SiÀH x bands are located around 2100 and 913 cm À1 .…”
Section: Functionalization Of Porous Silicon Nanowires With Acrylic Acidmentioning
confidence: 99%
“…In fact, the relatively distinct peak observed at ϳ1107 cm −1 has been assigned to the bulk Si-O-Si mode. 27,28 The distinct peak observed at ϳ668 cm −1 in the FTIR spectrum of HF-prepared PSi ͓Fig. 4͑b͔͒ can be assigned to the Si-H n wagging vibration of SiH 2 surface species.…”
Section: Ftir Spectroscopymentioning
confidence: 99%
“…This new absorption peak occurs at ϳ1065 cm −1 and is assigned to the surface Si-O-Si stretching mode ͑Si-O-Si͒. 8 The correlation between the PL and FTIR spectra for freshly prepared PSi in 1 M KF solution and that passively etched in 47% HF solution is shown in Fig. 4.…”
mentioning
confidence: 93%
“…Indeed, the ϳ1107 cm −1 peak has been assigned to the bulk Si-O-Si mode. 7,8 The FTIR spectra of the HF-cleaned silicon ͓Fig. 3͑b͔͒ and HF-prepared PSi ͓Fig.…”
mentioning
confidence: 99%