From the Implementation to the Characterisation and Assembling of Microfabricated Optical Alcali Vapor Cell for MEMS Atomic Clocks

Nieradko, Ł.; Gorecki, Christophe; Dziuban, Jan; Douahi, A.; Giordano, V.; Beugnot, Jean‐Charles; Guérandel, Stéphane; Moraja, Marco

doi:10.1109/sensor.2007.4300067

Cited by 3 publications

(3 citation statements)

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“…The packaging of atomic vapor cells is achieved by dropping an alkali metal into a vapor cell under vacuum conditions by a micro-pipette (Figure 12) [45,[57][58][59][60].…”

Section: Direct Filling Methods Of Alkali Metal Elements In the Physi...mentioning

confidence: 99%

“…The packaging of atomic vapor cells is achieved by dropping an alkali metal into a vapor cell under vacuum conditions by a micro-pipette (Figure 12) [45,[57][58][59][60]. In 2004, Liew et al of NIST utilized the direct filling method of alkali metal to encapsulate the atomic vapor cell [61].…”

Section: Direct Filling Methods Of Alkali Metal Elements In the Physi...mentioning

confidence: 99%

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Recent Progress on Micro-Fabricated Alkali Metal Vapor Cells

Wang

et al. 2022

Biosensors

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Alkali vapor cells are the core components of atomic sensing instruments such as atomic gyroscopes, atomic magnetometers, atomic clocks, etc. Emerging integrated atomic sensing devices require high-performance miniaturized alkali vapor cells, especially micro-fabricated vapor cells. In this review, bonding methods for vapor cells of this kind are summarized in detail, including anodic bonding, sacrificial micro-channel bonding, and metal thermocompression bonding. Compared with traditional through-lighting schemes, researchers have developed novel methods for micro-fabricated vapor cells under both single- and double-beam schemes. In addition, emerging packaging methods for alkali metals in micro-fabricated vapor cells can be categorized as physical or chemical approaches. Physical methods include liquid transfer and wax pack filling. Chemical methods include the reaction of barium azide with rubidium chloride, ultraviolet light decomposition (of rubidium azide), and the high-temperature electrolysis of rubidium-rich glass. Finally, the application trend of micro-fabricated alkali vapor cells in the field of micro-scale gyroscopes, micro-scale atomic clocks, and especially micro-scale biomagnetometers is reviewed. Currently, the sensing industry has become a major driving force for the miniaturization of atomic sensing devices, and in the near future, the micro-fabricated alkali vapor cell technology of atomic sensing devices may experience extensive developments.

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“…The packaging of atomic vapor cells is achieved by dropping an alkali metal into a vapor cell under vacuum conditions by a micro-pipette (Figure 12) [45,[57][58][59][60].…”

Section: Direct Filling Methods Of Alkali Metal Elements In the Physi...mentioning

confidence: 99%

Section: Direct Filling Methods Of Alkali Metal Elements In the Physi...mentioning

confidence: 99%

Recent Progress on Micro-Fabricated Alkali Metal Vapor Cells

Wang

et al. 2022

Biosensors

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“…The most promising MEMS cell technology is based on laser-induced alkali metal vapor dispensing done inside the sealed cells [73,74,75,76,77,78]. The MEMS cell consists of a micromachined silicon body, which has both sides covered with anodically bonded glass wafers (borosilicate glass).…”

Section: Methods Of Mems Vapor Cell Fabricationmentioning

confidence: 99%

Technological Assessment of MEMS Alkali Vapor Cells for Atomic References

Knapkiewicz

2018

Micromachines

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This paper is a review that surveys work on the fabrication of miniature alkali vapor cells for miniature and chip-scale atomic clocks. Technology on microelectromechanical systems (MEMS) cells from the literature is described in detail. Special attention is paid to alkali atom introduction methods and sealing of the MEMS structure. Characteristics of each technology are collated and compared. The article’s rhetoric is guided by the proposed classification of MEMS cell fabrication methods and contains a historical outline of MEMS cell technology development.

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