2011
DOI: 10.1166/jnn.2011.3966
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Formation of Cu or Cu2O Nanoparticles Embedded in a Polyimide Film for Nanofloating Gate Memory

Abstract: Cu and Cu2O nanoparticles were fabricated in polyimide by curing the stacked polyamic acid/Cu/polyamic acid on Si wafer and post heat treatment. Nanoparticle distribution in polyimide (a monolayer of vertically aligned nanoparticles or the randomly dispersed nanoparticles) can be controlled by changing the reactivity of Cu with PAA and curing atmosphere. About 6-7 nm sized Cu or Cu2O nanoparticles were observed in the polyimide film. The capacitance-voltage curves were measured with Al/particles in polyimide/p… Show more

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“…Zhao et al [73] prepared bovine insulin nanoparticles by the supercritical fluid technology method with different proportions of PEG and PLA copolymer as carriers. The average particle size was 400–600 nm.…”
Section: Methods For Preparing Drug Carriersmentioning
confidence: 99%
“…Zhao et al [73] prepared bovine insulin nanoparticles by the supercritical fluid technology method with different proportions of PEG and PLA copolymer as carriers. The average particle size was 400–600 nm.…”
Section: Methods For Preparing Drug Carriersmentioning
confidence: 99%