2001
DOI: 10.1002/1521-4095(200108)13:15<1174::aid-adma1174>3.0.co;2-q
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Formation of a Cobalt Magnetic Dot Array via Block Copolymer Lithography

Abstract: Single‐domain cobalt dot arrayswith high magnetic particle density, patterned over large areas (e.g., 10 cm diameter wafers) are fabricated by self‐assembled block copolymer lithography, using a polystyrene–poly(ferrocenyldimethylsilane) copolymer as a template. By varying the copolymer type and etching conditions the magnetic properties can be tuned. The Figure shows a typical array of Co dots with tungsten caps obtained via this procedure.

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Cited by 652 publications
(510 citation statements)
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References 7 publications
(9 reference statements)
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“…In bulk, due to thermodynamically incompatible and chemically immiscible blocks balance the entropic and enthalpic driven phase separation and the chemical bond constraints between the blocks driven the formation of ordered domains on nanometer features [1][2][3][4][5][6][7]. Nanoscale features with high precision and their rising demand for nanoscale fabrication methods, combined with the inherent feature-size limitations of optical lithography and the low throughput of electronbeam lithography, have motivated a search for cost-effective nanoscale fabrication technologies, including nanoimprint lithography [8], dippen nanolithography [9], and self-assembled block copolymer lithography [10][11][12][13][14]. For such nanostructured materials to be useful in thin-film applications, it should produce periodic arrays over a large area with uniform thickness and well-ordered BCP microdomains.…”
Section: Block Copolymers In Nanoscience and Nanotechnologymentioning
confidence: 99%
“…In bulk, due to thermodynamically incompatible and chemically immiscible blocks balance the entropic and enthalpic driven phase separation and the chemical bond constraints between the blocks driven the formation of ordered domains on nanometer features [1][2][3][4][5][6][7]. Nanoscale features with high precision and their rising demand for nanoscale fabrication methods, combined with the inherent feature-size limitations of optical lithography and the low throughput of electronbeam lithography, have motivated a search for cost-effective nanoscale fabrication technologies, including nanoimprint lithography [8], dippen nanolithography [9], and self-assembled block copolymer lithography [10][11][12][13][14]. For such nanostructured materials to be useful in thin-film applications, it should produce periodic arrays over a large area with uniform thickness and well-ordered BCP microdomains.…”
Section: Block Copolymers In Nanoscience and Nanotechnologymentioning
confidence: 99%
“…Confinement of magnetic species to the nanometre regime is known to enhance the magnetic properties 13 . The use of block copolymers (BCPs) to assemble nanoscopic elements with high density 17,18 (1 to 10 Terabits per square inch) is established, and attempts to exploit BCP templates to organize magnetic components has received considerable attention in the last two decades 19,20 . Although many strategies exist, they can be classified broadly into three different approaches that capitalize on the inherent nanoscopic order of the BCP.…”
mentioning
confidence: 99%
“…The normalized room-temperature hysteresis loops measured both on bare and Au-coated Ni 80 Fe 20 NDs still attached on the substrate and subsequently dispersed in water are shown in figure 3. As expected, the magnetization reversal of bare-NDs (black and green circles, respectively, for attached (figure 3a) and water-dispersed (figure 3b) discs) is typical of a magnetic vortex behaviour [24,30].…”
Section: Resultsmentioning
confidence: 99%
“…In particular, in this paper, a comparative cytotoxicity study of Au-coated and bare Ni 80 Fe 20 NDs at different concentrations has been performed on HT-29 human colorectal adenocarcinoma cells. Subsequently, a functionalization of gold surface of coated NDs was performed with a cysteine-fluorescein isothiocyanate (FITC) derivative in order to induce a random fluorescence and use them to evaluate the intracellular uptake.…”
Section: Introductionmentioning
confidence: 99%