Formation, Focusing and Transport of Highintensity, Low-Energy Metal Ion Beams

Generation of high-power submillisecond metal ion beams

“…The neutralization time is specified by the removal of plasma ions from the beam. Just as in the case of shaping of high-intensity low-energy metal ion beams [11], this time does not exceed several microseconds. At the first stage, the density of ions, which were accelerated in the charge separation layer, entering the drift space is almost an order of magnitude lower than the density of electrons in plasma.…”

“…The feasibility of generation of pulseperiodic ion beams with a pulse duration of 2-8 µs at a rate of 10 5 imp/s with an ion current density up to 1 A/cm 2 under negative bias potentials up to 3 kV in amplitude was demonstrated. Negative effects associated with the formation of a virtual anode in experiments with a pulse duration increased to 30 µs were suppressed successfully with the use of an additional thermionic electron source [11].…”