2010
DOI: 10.1007/978-3-642-11598-1_9
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Abstract: Abstract. The ability to manufacture and manipulate components at the microscale is critical to the development of micro systems. This paper presents the technique to manipulate micro/nano parts at the micro/nano-scale using an integrated Focused Ion Beam (FIB) system composed of scanning electron microscope, micro manipulator and gas injection system. Currently the smallest gears manufactured with traditional techniques were reported to have a module of 10 μm. As a test example, in this research we applied t…

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