2011
DOI: 10.1007/128_2011_146
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Flow Control Methods and Devices in Micrometer Scale Channels

Abstract: Recent advances in the fabrication of microflow devices using micro-electromechanical systems (MEMS) technology are described. Passive and active liquid flow control and particle-handling methods in micrometer-scale channels are reviewed. These methods are useful in micro total analysis systems (μTAS) and laboratory-on-a-chip systems. Multiple flow control systems (i.e., arrayed microvalves) for advanced high-throughput microflow systems are introduced. Examples of microflow devices and systems for chemical an… Show more

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Cited by 18 publications
(16 citation statements)
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“…These approaches include preparative scale (FACS)-sorting 88 and the recently developed use of microelectromechanical systems (MEMS) chips 89 in combination with a FACS-based detection system. In both cases, cells can be labeled with multiple markers, allowing for the isolation of well-defined T cell subsets at high purity.…”
Section: Preparative Facs-sorting and Microfluidic Chipsmentioning
confidence: 99%
“…These approaches include preparative scale (FACS)-sorting 88 and the recently developed use of microelectromechanical systems (MEMS) chips 89 in combination with a FACS-based detection system. In both cases, cells can be labeled with multiple markers, allowing for the isolation of well-defined T cell subsets at high purity.…”
Section: Preparative Facs-sorting and Microfluidic Chipsmentioning
confidence: 99%
“…3D-focusing microfluidic devices are less common and structurally complex. They are difficult to fabricate using traditional Polydimethylsiloxane (PDMS), requiring several lithography and molding cycles [272]. Our device requires channels approximately 1x1 mm, but very few PDMS devices have been made with such large dimensions due to time and expense constraints.…”
Section: Future Workmentioning
confidence: 99%
“…Among these valves, the pneumatically controlled valve has been applied in many types of devices because of its simplicity of fabrication and the possibility of multiple-valve manipulation [4,7]. However, the operation of the pneumatic valve is controlled by an off-chip solenoid valve, and the large-scale integration of microvalves requires the same numbers of off-chip control solenoid valves and world-to-chip connectors [13]. We have developed flow control systems that have one input and two to five outputs thermoreversible gelation of hydrogel with infrared (IR) laser-induced local heating [14][15][16].…”
Section: Introductionmentioning
confidence: 99%