KEYWORDSmetal oxide, gas sensor, MEMS, tin oxide (SnO2), nanowire, nanotube, liquid phase deposition
ABSTRACTWe have developed highly sensitive, low power gas sensors through the novel integration method of porous SnO2 nanotubes (NTs) on a micro-electro-mechanical-systems (MEMS) platform. As a template material, ZnO nanowires (NWs) were directly synthesized on beamshaped, suspended microheaters through in-situ localized hydrothermal reaction induced by 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 2 local thermal energy around the Joule-heated area. Also, liquid phase deposition (LPD) process enabled the formation of porous SnO2 thin film on the surface of ZnO NWs and simultaneous etching of ZnO core, eventually to generate porous SnO2 NTs. Due to the localized synthesis of SnO2 NTs on the suspended microheater, very low power for the gas sensor operation (< 6 mW) has been realized. Moreover, sensing performance (e.g. sensitivity and response time) of synthesized SnO2 NTs was dramatically enhanced compared to those of ZnO NWs. In addition, the sensing performance was further improved by forming SnO2-ZnO hybrid nanostructures due to the heterojunction effect.