2011
DOI: 10.1016/j.microrel.2010.06.006
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Fine pitch copper wire bonding in high volume production

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Cited by 52 publications
(16 citation statements)
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“…The potentials and cost considerations of finding an alternative to replace gold wire bonding in microelectronic packaging are driven by new technologies coming to the market [1]. Copper wire bonding appears to be the alternate materials, and various engineering studies on copper wire deployment have been reported [2,3]. The Au-Al intermetallic compound (IMC) growth is widely characterized and analyzed [4][5][6].…”
Section: Introductionmentioning
confidence: 99%
“…The potentials and cost considerations of finding an alternative to replace gold wire bonding in microelectronic packaging are driven by new technologies coming to the market [1]. Copper wire bonding appears to be the alternate materials, and various engineering studies on copper wire deployment have been reported [2,3]. The Au-Al intermetallic compound (IMC) growth is widely characterized and analyzed [4][5][6].…”
Section: Introductionmentioning
confidence: 99%
“…Au wire diameter has continued to decrease to 15 µm due to rising gold prices and shrinking pad size [5,6]. On the other hand, the rising gold price has motivated the packaging industry to look for alternative wire materials such as silver (Ag) and copper (Cu) [7][8][9][10][11]. Recently, several packaging companies have bonded Cu wires on Al bond-pads in production.…”
Section: Introductionmentioning
confidence: 99%
“…Since Cu wires get oxidized easily and exhibit higher hardness as compared to Au and Ag alloy wires, Cu wires possess a narrower process window for wire bonding. The high hardness of Cu could cause Al pads splashing, and the higher bonding force for Cu wire bonding could induce Si chip cratering [9]. In addition, Cu-Al wire bonds exhibit low corrosion resistance to halogen elements under high humidity.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, copper wire bonding appears to be the alternate materials and various engineering studies on copper wire development have been reported [1]. Technical barriers and reliability challenges of Cu wire bonding in microelectronics packaging are well identified [2][3][4][5][6][7][8][9][10][11]. Au-Al microstructure evolution and intermetallic compound (IMC) formation is widely studied by Karpel et al [12].…”
Section: Introductionmentioning
confidence: 99%