Film thickness effect on texture and residual stress sign transition in sputtered TiN thin films

Xi, Yeting; Gao, Kewei; Pang, Xiaolu; Yang, Huisheng; Xiong, Xiang; Li, Hong; Volinsky, Alex A.

doi:10.1016/j.ceramint.2017.06.050

Cited by 83 publications

(24 citation statements)

References 44 publications

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“…However, they slightly decrease at 400 °C. In general, sputtering thin films have been reported to generate intrinsic stress internally and on the surface by the atomic peening effect . In addition, thermal stress is generated through the heat treatment process.…”

Section: Resultsmentioning

confidence: 91%

A Study on Transparent Electrode Properties of Indium Tin Oxide Thin Films Deposited From Recycled Target

Lee

Park

et al. 2020

Bulletin Korean Chem Soc

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In this study, we investigated the transparent electrode and mechanical properties of indium tin oxide (ITO) thin films deposited from recycled targets of In2O3 (90 wt %) and SnO3 (10 wt %). We also evaluated the effect of their heat treatment at different temperatures. The ITO thin film deposited on the glass substrate at ambient temperature exhibited microcrystallization characteristics in which the amorphous state was incorporated. When the annealing temperature was over 200 °C, the ITO thin film showed stable transparent electrode characteristics with a sheet resistance value of 7.2 Ω/sq and high transmittance of more than 85% in the visible light region through recovery and recrystallization. Under compressive stress, the ITO thin film exhibited stable elastic modulus and hardness values of more than 110 GPa and 6.0 GPa, respectively. It is anticipated that these outcomes will meet the electrical, optical, and mechanical property requirements for commercial ITO transparent electrodes.

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Section: Resultsmentioning

confidence: 91%

A Study on Transparent Electrode Properties of Indium Tin Oxide Thin Films Deposited From Recycled Target

Lee

Park

et al. 2020

Bulletin Korean Chem Soc

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“…A high correlation means a great similarity between two different signals. In the work of Yamaguchi (1981), the strain information of a brass plate stressed in a tensile test was obtained by calculating the 1D speckle correlation. In addition, mi-croscopic deformations in the uniform tensile test were also measured by digital speckle correlation (Sun et al, 1997).…”

Section: Algorithmsmentioning

confidence: 99%

“…Currently, there is no technique available that allows for direct, noncontact testing and fast determination of mechanical stress in ceramics. Traditional techniques such as the X-ray diffraction method (Gao et al, 2017;Xi et al, 2017), Raman spectroscopy (Jan-notti et al, 2017), and the hole-drilling method (Mainjot et al, 2011) are time-consuming, expensive, and sometimes destructive. In addition, speckle photography is a full-field optical method and, by combining it with the digital image correlation technique, can be used to measure in-plane deformations and strains in opaque materials (Blug et al, 2019;Schenuit et al, 2008;Tausendfreund et al, 2018).…”

Section: Introductionmentioning

confidence: 99%

Characterization of ceramics based on laser speckle photometry

Chen

Cikalova

Bendjus

et al. 2020

J. Sens. Sens. Syst.

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Abstract. Advanced ceramic components are frequently used in industrial applications. As a brittle material, ceramic reacts very suddenly to excessively high stresses. Existing defects lead to rapid crack growth followed by spontaneous destruction. This leads to a functional failure of the entire component. It is therefore important to develop innovative techniques to ensure a good quality condition of ceramic products. Laser speckle photometry (LSP) is an optical nondestructive testing method. It is based on the dynamic analysis of time-resolved speckle patterns that are generated by an external excitation. In this paper, we will present two investigations on ceramic components using the LSP technique. One is the nondestructive stress characterization on ceramic surfaces, and the other is the defect detection on ceramics components. The aim is to improve the quality and safety control of ceramic production in the challenging industrial field. Preliminary results have shown the potential of the LSP sensor system for the nondestructive characterization of ceramics in terms of stress monitoring and surface defect detection.

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“…Because, for a given film synthesized during a given process, the stress (and consequently the value of the measured radius) could not be predicted, the only way to control the relevancy of the stress calculation is the use of Eqs. 4and (5).…”

Section: Influence Of the Coating Thicknessmentioning

confidence: 99%

“…The major and uncountable part of publications mentions stress only as one among other film properties. Some authors use the XRD technique [3][4][5], other the curvature method [6,7], few both techniques [8]. In these studies, the calculated stress values are put in relation to film properties (i.e.…”

Section: Introductionmentioning

confidence: 99%

Curvature radius measurement by optical profiler and determination of the residual stress in thin films

Besnard

Ardigò

Imhoff

et al. 2019

Applied Surface Science

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The Stoney formula, based on the measurement of the substrate curvature, is often used for the determination of the thin films' residual stress. In this study, titanium nitride coatings were deposited by DC reactive magnetron sputtering on silicon substrates. An optical profiler was used to determine the curvature of the surface before and after coating. Two radii were then obtained, along the principal perpendicular directions of the surface curvature. A simple and efficient method to determine the experimental error on the stress calculation was developed taking into account the film thickness dispersion and the radii dispersion. Using constant deposition parameters, some samples' characteristics were tested: film and substrate thickness, size, shape and crystallographic orientations of the substrates. With the help of the developed error method, we analyzed what can be conclude about the influence of these characteristics on the calculated stress values, obtained from the experimental measurements.

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Film thickness effect on texture and residual stress sign transition in sputtered TiN thin films

Cited by 83 publications

References 44 publications

A Study on Transparent Electrode Properties of Indium Tin Oxide Thin Films Deposited From Recycled Target

A Study on Transparent Electrode Properties of Indium Tin Oxide Thin Films Deposited From Recycled Target

Characterization of ceramics based on laser speckle photometry

Curvature radius measurement by optical profiler and determination of the residual stress in thin films

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