KEM 2009 DOI: 10.4028/ View full text
Mikinori Nagano, Hiroyuki Takai, Kazuya Yamamura, Dai Yamazaki, Ryuji Maruyama, Kazuhiko Soyama

Abstract: Numerically controlled local wet etching is a novel figuring method for fabricating the ultraprecision optical components and/or finishing the functional materials. In this method, localized wet etching area is formed by applying the combination nozzle which consists of a supply part and a suction part of an etchant, and the removal volume at any point on the workpiece surface is determined by the dwelling time of the nozzle. In this paper, we proposed the two-step figuring process, which consists of a rough f…

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