2010
DOI: 10.1007/978-3-642-11598-1_8
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Abstract: Abstract. The paper offers evidence on the feasibility of a newly proposed micromachining process, which is motivated by the need to overcome the various limitations associated with µ-EDM and conventional ultra-short laser micromachining processes. The limitations in µ-EDM and laser micro-machining processes are mainly due to the requirement of a conductive electrode and workpiece, electrode wear and compensation strategies, and complex process control mechanisms respectively. The new process uses a laser beam… Show more

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Cited by 20 publications
(2 citation statements)
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References 9 publications
(17 reference statements)
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“…The foremost benefit of laser micromachining is its suitability to pattern various types of materials. Similar to the micro-EDM technique, LMM can be applied only to thermally conductive materials [193]. Different laser types can be used to process ceramics such as microsecond (Co 2 and Nd:YAG) and excimer lasers.…”
Section: Laser Micro-machiningmentioning
confidence: 99%
“…The foremost benefit of laser micromachining is its suitability to pattern various types of materials. Similar to the micro-EDM technique, LMM can be applied only to thermally conductive materials [193]. Different laser types can be used to process ceramics such as microsecond (Co 2 and Nd:YAG) and excimer lasers.…”
Section: Laser Micro-machiningmentioning
confidence: 99%
“…Wee et al 13 conducted laser ablation micromachining tests on silicon wafer, both in air and under flowing water stream, with the use of 355-nm X-AVIA lasers. Pallav and Ehmann 14 proposed a laserbased technique in a dielectric to create plasma near the workpiece surface whose explosive expansion results in material removal by mechanisms similar to those that occur in microelectric discharge machining (m-EDM). Mathur et al 15 fabricated the microfluidic channels on PMMA using hot embossing process.…”
Section: Brief Review Of Literaturementioning
confidence: 99%