volume 12, issue 9, P096503 2019
DOI: 10.7567/1882-0786/ab37ae
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Abstract: This paper presents an FFT (fast Fourier transform) analytical method for the study of surface structures fabricated by laser interference lithography (LIL). In the work, the FFT analytical method combined with Gaussian fitting is used to determine the periods and pattern distributions of surface structures from frequency spectra. For LIL, the processing parameters of incident and azimuth angles can be obtained corresponding to the period and pattern distribution. This work facilitates the detection of micro-a…

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