Abstract:In order to obtain the excellent silicon nitride (SiN) films in AlGaAs laser, SiN films with different deposition parameters are fabricated on GaAs substrate by plasma enhanced chemical vapor deposition (PECVD) at low temperature. The residual stress, surface morphology and refractive index of these films are investigated comprehensively by means of refractometer, atomic force microscope (AFM) and Fourier transform infrared spectroscopy (FTIR). The results show that residual stress of SiN films increases with … Show more
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