Fabrication of photonic band gap structures in As40S60 by focused ion beam milling

Dale, Gregory E.; Langford, R. M.; Ewen, Peter; Reeves, C.M.

doi:10.1016/s0022-3093(00)00021-1

Cited by 17 publications

(9 citation statements)

References 11 publications

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“…at room temperature (RT). NIL is a competing technology to traditional optical lithographic techniques [15], direct laser writing (DLW) [16], holography [17], and focused ion beam (FIB) milling [18], all of which are costly, time-consuming and complex. It is the DLW which has been gaining lots of interest especially for its versatility in patterned shapes and variety of materials being used [19].…”

Section: Introductionmentioning

confidence: 99%

Sub-micrometer soft lithography of a bulk chalcogenide glass

Kohoutek¹,

Orava²,

Greer³

et al. 2013

Opt. Express

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Abstract:We demonstrate, for the first time, time-and cost-effective replication of sub-micrometer features from a soft PDMS mold onto a bulk chalcogenide glass over a large surface area. A periodic array of submicrometer lines (diffraction grating) with period 625 nm, amplitude 45 nm and surface roughness 3 nm was imprinted onto the surface of the chalcogenide AsSe2 bulk glass at temperature 225°C, i.e. 5°C below the softening point of the glass. Sub-micrometer soft lithography into chalcogenide bulk glasses shows good reliability, reproducibility and promise for feasible fabrication of various dispersive optical elements, antireflection surfaces, 2D photonic structures and nano-structured surfaces for enhanced photonic properties and chemical sensing. References and links1. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, "Nanoimprint lithography," J. Vac. Sci. Technol. B 14(6), 4129-4133 (1996). 2. Y. Xia and G. M. Whitesides, "Soft lithography," Angew. Chem. Int. Ed. 37(5), 550-575 (1998)

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Section: Introductionmentioning

confidence: 99%

Sub-micrometer soft lithography of a bulk chalcogenide glass

Kohoutek¹,

Orava²,

Greer³

et al. 2013

Opt. Express

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“…A number of applications are found for the FIB, which relate to luminescence properties of materials. For example, the FIB is used for producing photonic structures in silicon layers on insulators (Balasubramanian et al , 2006) and on As 40 S 60 (Dale et al , 2000). Also, when applied to GaN, the FIB causes swelling; enabling the formation of high aspect ratio pillars with only a minor shift in the CL emission spectrum (Wu et al , 2008).…”

Section: Introductionmentioning

confidence: 99%

FIB-SEM cathodoluminescence tomography: practical and theoretical considerations

Winter

Lebbink

Vries

et al. 2011

Journal of Microscopy

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Focused ion beam-scanning electron microscope (FIB-SEM) tomography is a powerful application in obtaining three-dimensional (3D) information. The FIB creates a cross section and subsequently removes thin slices. The SEM takes images using secondary or backscattered electrons, or maps every slice using X-rays and/or electron backscatter diffraction patterns. The objective of this study is to assess the possibilities of combining FIB-SEM tomography with cathodoluminescence (CL) imaging. The intensity of CL emission is related to variations in defect or impurity concentrations. A potential problem with FIB-SEM CL tomography is that ion milling may change the defect state of the material and the CL emission. In addition the conventional tilted sample geometry used in FIB-SEM tomography is not compatible with conventional CL detectors. Here we examine the influence of the FIB on CL emission in natural diamond and the feasibility of FIB-SEM CL tomography. A systematic investigation establishes that the ion beam influences CL emission of diamond, with a dependency on both the ion beam and electron beam acceleration voltage. CL emission in natural diamond is enhanced particularly at low ion beam and electron beam voltages. This enhancement of the CL emission can be partly explained by an increase in surface defects induced by ion milling. CL emission enhancement could be used to improve the CL image quality. To conduct FIB-SEM CL tomography, a recently developed novel specimen geometry is adopted to enable sequential ion milling and CL imaging on an untilted sample. We show that CL imaging can be manually combined with FIB-SEM tomography with a modified protocol for 3D microstructure reconstruction. In principle, automated FIB-SEM CL tomography should be feasible, provided that dedicated CL detectors are developed that allow subsequent milling and CL imaging without manual intervention, as the current CL detector needs to be manually retracted before a slice can be milled. Due to the required high electron beam acceleration voltage for CL emission, the resolution for FIB-SEM CL tomography is currently limited to several hundreds of nm in XY and up to 650 nm in Z for diamonds. Opaque materials are likely to have an improved Z resolution, as CL emission generated deeper in the material is not able to escape from it.

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“…This is a common problem that is often alleviated by using a reactive gas. A previous attempt at PhC fabrication was made in a plate of As 2 S 3 chalcogenide glass by FIB milling with and without the assistance of I 2 gas [12]. The highest aspect ratio of 6:1 was achieved with gas assistance at low beam currents, ≤ 12 pA.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of planar photonic crystals in a chalcogenide glass using a focused ion beam

Freeman¹,

Madden²,

Luther‐Davies³

2005

Opt. Express

104

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Free-standing "AMTIR-1" (Ge33As12Se55) chalcogenide glass films have been patterned using a focused ion beam (FIB) to create two-dimensional photonic crystal membranes. The triangular lattices were selected for a photonic bandgap relevant to fiber telecommunications. Optical measurements of transmission spectra as a function of incident angle showed clear signs of Fano resonances, indicating that the structures had strongly modified guided modes.

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Fabrication of photonic band gap structures in As40S60 by focused ion beam milling

Cited by 17 publications

References 11 publications

Sub-micrometer soft lithography of a bulk chalcogenide glass

Sub-micrometer soft lithography of a bulk chalcogenide glass

FIB-SEM cathodoluminescence tomography: practical and theoretical considerations

Fabrication of planar photonic crystals in a chalcogenide glass using a focused ion beam

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