KEM 2009 DOI: 10.4028/www.scientific.net/kem.412.291 View full text
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Shigeru Horii, Masayuki Sakurai, Tetsuo Uchikoshi, Ryoji Funahashi, Tohru Suzuki, Yoshio Sakka, Hiraku Ogino, Jun Ichi Shimoyama, Kohji Kishio

Abstract: In order to investigate thermoelectric properties of Co Sb binary films with a wide deposited composition range from 50 to 80 atSb, Co/Sb multi layered films with AlN capped layer are synthesized by rf sputtering method. As deposited films are an-nealed at 773 K for 1 h in a vacuum atmosphere. Transmission electron microscopy observation reveals the evolution of CoSb b phase, CoSb 2  g phase and CoSb 3  d phase at elevating temperature, which corresponds to the variations of electrical resistance. Anne…

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