Fabrication of Multi-Layered Thermoelectric Thick Films and their Thermoelectric Performance

Abstract

In order to investigate thermoelectric properties of Co Sb binary films with a wide deposited composition range from 50 to 80 atSb, Co/Sb multi layered films with AlN capped layer are synthesized by rf sputtering method. As deposited films are an-nealed at 773 K for 1 h in a vacuum atmosphere. Transmission electron microscopy observation reveals the evolution of CoSb b phase, CoSb 2  g phase and CoSb 3  d phase at elevating temperature, which corresponds to the variations of electrical resistance. Anne…