2007
DOI: 10.1063/1.2742310
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Fabrication of highly conductive Ti1−xNbxO2 polycrystalline films on glass substrates via crystallization of amorphous phase grown by pulsed laser deposition

Abstract: Nb-doped anatase TiO2 [Ti0.94Nb0.06O2 (TNO)] films with high electrical conductivity and transparency were fabricated on nonalkali glass using pulsed laser deposition and subsequent annealing in a H2 atmosphere. The amorphous films as deposited on unheated substrates were found to crystallize, forming polycrystalline films at around 350°C. The films annealed at 500°C showed resistivity down to 4.6×10−4Ωcm at room temperature and optical transmittance of 60%–80% in the visible region, which are comparable to th… Show more

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Cited by 151 publications
(126 citation statements)
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“…Within this concept, the obtained alignment with a lower conduction band in anatase agrees with the higher electron concentrations, which can be achieved in anatase, for example, by Nb doping compared to rutile. 38 The presented experiments and electronic structure calculations consistently reveal a staggered energy band alignment between anatase and rutile, with the valence band maximum of rutile at 0.7 ± 0.1 eV (experimental) or 0.63 eV (theoretical) above that of anatase. Transitivity of energy band alignment has been demonstrated explicitly using two different conducting oxides as contact materials, which gives confidence that the experimentally determined alignment is not corrupted by defect-induced Fermi level pinning.…”
mentioning
confidence: 92%
“…Within this concept, the obtained alignment with a lower conduction band in anatase agrees with the higher electron concentrations, which can be achieved in anatase, for example, by Nb doping compared to rutile. 38 The presented experiments and electronic structure calculations consistently reveal a staggered energy band alignment between anatase and rutile, with the valence band maximum of rutile at 0.7 ± 0.1 eV (experimental) or 0.63 eV (theoretical) above that of anatase. Transitivity of energy band alignment has been demonstrated explicitly using two different conducting oxides as contact materials, which gives confidence that the experimentally determined alignment is not corrupted by defect-induced Fermi level pinning.…”
mentioning
confidence: 92%
“…A recently discovered alternative is doped TiO 2 [3,4], which is different from the other TCOs in that conduction takes place in the d-band rather than in the s-band [5,6]. Earlier work on TCO-type TiO 2 :Nb has employed pulsed laser deposition [3,[7][8][9][10][11][12][13][14], rf magnetron sputtering [15], and dc magnetron sputtering [11,[16][17][18]. The sputtered films were post-treated in H 2 or vacuum at 400 to 600 °C for 1 h, in order to exhibit favorable electrical properties.…”
Section: Introductionmentioning
confidence: 99%
“…Thus, crystallization of amorphous films by annealing in reductive atmosphere [14] or using lower-oxide based such as Ti 2 O 3 -or Ti-metal based targets [15] are effective methods to prepare highly conducting NTO films. Oxygen-deficient NTO showed metallic conductivity [16].…”
Section: Introductionmentioning
confidence: 99%