Fabrication of Cross-Sinusoidal Anti-Reflection Nanostructure on a Glass Substrate Using Imperfect Glass Imprinting with a Nano-Pin Array Vitreous Carbon Stamp

Abstract

Although polymer nanoimprinting on glass substrates has been widely employed for the fabrication of functional anti-reflective (AR) nanostructures, several drawbacks exist with respect to durability and delamination. The direct patterning of glass material is a potential solution for outdoor applications that require AR functional nanostructured glass plates. In this study, a glass imprinting technique was employed for the fabrication of an AR nanostructure on a soda-lime glass substrate using a vitreous carbon (VC) stamp. The VC stamp, which had a high aspect ratio nanopost array with a pitch of 325 nm, diameter of 110 nm, and height of ~220 nm, was fabricated by the carbonization of a replicated Furan precursor from an Si master. During the glass imprinting process using the nanopost array VC stamp, the softened glass material gradually protruded into the spaces between the nanopins owing to viscoelastic behavior, and one can achieve a cross-sinusoidal surface relief under specific imprinting condition, which can be used as an AR nanostructure with a gradually increasing refractive index. The effects of the processing temperature on the surface profile of the glass imprinted parts and the measured transmission spectra were analyzed, and a glass imprinting temperature of 700 °C and pressure of 1 MPa were found to be the optimum condition. The height of the fabricated cross-sinusoidal nanostructure was 80 nm, and the light transmission was increased by ~2% over the entire visible-light range. Furthermore, the measured transmission spectrum observed to be in good agreement with the simulation results.

Laser Pyrolysis of Imprinted Furan Pattern for the Precise Fabrication of Microsupercapacitor Electrodes

“…In addition to laser pyrolysis, the polymer pattern could be carbonized using an electric furnace [ 35 , 36 ]. As demonstrated in our earlier study, a vitreous carbon mold can be successfully produced from furan by high-temperature (1000 °C) pyrolysis using an electric furnace [ 37 ]. However, when the imprinted furan micropattern (30 µm thick for this sample) was heated at the same high temperature under a nitrogen gas flow, severe cracks were generated due to the shrinkage of the furan structure by pyrolysis [ 38 ].…”

Fabrication of Laser-Induced Graphene on Carbon Electrodes for Efficient Hydrogen Evolution Reaction

“…The LIG obtained after pyrolysis was denoted LIG-CF-x, where "x" represents the laser power in watt, for further analysis. A detailed description of the pyrolysis process in the electric furnace for polymer materials can be found in other literature and is not provided herein as the exploitation of LIG-CF electrodes in HER is the main focus of this study [36,37].…”

A Comprehensive Review of Micro/Nano Precision Glass Molding Molds and Their Fabrication Methods

“…Examples of micro/nano glass molding using GC molds are summarized in Table S5 of the Supplementary Material [ 23 , 105 , 106 , 107 , 108 , 109 , 110 , 111 , 112 , 113 , 114 , 116 , 117 , 119 , 120 , 121 , 122 , 123 , 124 , 125 , 126 , 127 , 128 , 129 , 130 ]. There are approaches available to fabricate GC molds.…”