Fabrication and Optical Characterization of Polymeric Aspherical Microlens Array Using Hot Embossing Technology

Li, Yanlong; Li, Kangsen; Gong, Feng

doi:10.3390/app11020882

Cited by 11 publications

(5 citation statements)

References 27 publications

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“…For applications in the visible region, polymers are commonly used due to the benefits associated with low cost and the relative ease of processing and manufacturing. 2 , 3 …”

Section: Introductionmentioning

confidence: 99%

Rapid Fabrication of Silica Microlens Arrays via Glass 3D Printing

Liu

Oriekhov

Lee

et al. 2024

3D Printing and Additive Manufacturing

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Rapid manufacturing of high purity fused silica glass micro-optics using a filament-based glass 3D printer has been demonstrated. A multilayer 5 × 5 microlens array was printed and subsequently characterized, showing fully dense lenses with uniform focal lengths and good imaging performance. A surface roughness on the order of R a = 0.12 nm was achieved. Printing time for each lens was <10 s. Creating arrays with multifocal imaging capabilities was possible by individually varying the number of printed layers and radius for each lens, effectively changing the lens height and curvature. Glass 3D printing is shown in this study to be a versatile approach for fabricating silica micro-optics suitable for rapid prototyping or manufacturing.

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“…For applications in the visible region, polymers are commonly used due to the benefits associated with low cost and the relative ease of processing and manufacturing. 2 , 3 …”

Section: Introductionmentioning

confidence: 99%

Rapid Fabrication of Silica Microlens Arrays via Glass 3D Printing

Liu

Oriekhov

Lee

et al. 2024

3D Printing and Additive Manufacturing

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“…The fabrication processes of microlens arrays include ultra-precision machining technologies [11][12][13][14][15], laser direct writing [16][17][18], grayscale lithography [19,20], nanoimprint lithography [21][22][23][24], and thermal reflow processes [25][26][27][28]. Ultra-precision machining technologies, such as single point diamond turning (SPDT), are capable of fabricating microstructures with complex morphology and excellent precision.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Large-Area Silicon Spherical Microlens Arrays by Thermal Reflow and ICP Etching

Wu,

Dong,

Wang

et al. 2024

Micromachines

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In this paper, we proposed an efficient and high-precision process for fabricating large-area microlens arrays using thermal reflow combined with ICP etching. When the temperature rises above the glass transition temperature, the polymer cylinder will reflow into a smooth hemisphere due to the surface tension effect. The dimensional differences generated after reflow can be corrected using etching selectivity in the following ICP etching process, which transfers the microstructure on the photoresist to the substrate. The volume variation before and after reflow, as well as the effect of etching selectivity using process parameters, such as RF power and gas flow, were explored. Due to the surface tension effect and the simultaneous molding of all microlens units, machining a 3.84 × 3.84 mm2 silicon microlens array required only 3 min of reflow and 15 min of ICP etching with an extremely low average surface roughness Sa of 1.2 nm.

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“…Hot embossing has been widely employed in the production of PMMA microstructural surfaces because of its low cost, high efficiency, and high quality, which is beneficial for mass production [22]. Ultra-precision cutting, as a high-quality and high-deterministic physical processing method, is considered a promising method for fabricating large-scale microstructured surfaces and molds [23].…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Polymethyl Methacrylate (PMMA) Hydrophilic Surfaces Using Combined Offset-Tool-Servo Flycutting and Hot Embossing Methods

Wang,

Zhang

et al. 2023

Polymers

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Polymethyl methacrylate (PMMA) is a material with good surface wettability and has unique and widespread applications in industrial fields. However, fabricating this material in an environmentally friendly way while maintaining its mechanical robustness remains a challenging task. One effective way is through the rational design of microstructure surfaces. The current study fabricated a pyramid microstructure array on a mold surface using offset-tool-servo flycutting, which was then combined with hot embossing to replicate an inverted pyramid microstructure array on a PMMA surface. Firstly, a toolpath compensation algorithm was developed to linearize the arc toolpath and reduce the cost of ultra-precision lathe. Then, the algorithm was further developed to achieve automatic linear toolpath intersection, aiming to ensure the machining accuracy and improve machining efficiency. An experiment testing the linear toolpath intersecting at 90° was conducted, fabricating a pyramid microstructure array with nanoscale roughness on the mold surface. This surface was then employed for replicating an inverted pyramid microstructure array on the PMMA surface using hot embossing. Furthermore, the accuracy of replication was evaluated, and the experimental results demonstrated excellent replication fidelity, exceeding 98%. The microstructural surface of the PMMA exhibited a change in surface wettability. The wettability test showed a water-droplet contact angle reduction from 84.8° ± 0.1° to 56.2° ± 0.1°, demonstrating a good hydrophilic effect. This study introduces a novel, environmentally friendly and high-precision method to fabricate a functional PMMA surface with an inverted pyramid microstructure array. The results of this study also provide strong technical support and theoretical guidance for micro-nanostructure functional surface machining and replicating.

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Fabrication and Optical Characterization of Polymeric Aspherical Microlens Array Using Hot Embossing Technology

Cited by 11 publications

References 27 publications

Rapid Fabrication of Silica Microlens Arrays via Glass 3D Printing

Rapid Fabrication of Silica Microlens Arrays via Glass 3D Printing

Fabrication of Large-Area Silicon Spherical Microlens Arrays by Thermal Reflow and ICP Etching

Fabrication of Polymethyl Methacrylate (PMMA) Hydrophilic Surfaces Using Combined Offset-Tool-Servo Flycutting and Hot Embossing Methods

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