“…The upper ®gure shows the spectra of the Al ®lm surface exposed to air for 5 min, while the lower ®gure shows the spectra of the Al ®lm surface sputtered by Ar 1 gun for about 20 min. The peaks at 1411.3 and 1413.8 eV are characteristic of Al oxide and metallic Al, respectively, which is consistent with the result obtained by Li et al [10] We can clearly see the oxidation of the Al ®lm after 5 min exposure. If we assume that the oxide layer covers the pure Al surface uniformly, the relationship between the integrated intensity of the oxide state of surface layer, I s , and that of the bulk Al state, I b , can be expressed as…”