The isotypic series of the oxonitridosilicates RE 3 [Si 5 N 9 O] (RE = Dy-Er, Yb) was synthesized via solid-state reactions at high temperatures using a radio-frequency furnace. The crystal structures were solved and refined from single-crystal X-ray diffraction and powder X-ray diffraction data. Further characterizations were performed using vibrational spectroscopy (IR and Raman), REM-EDX measurements, lattice energy calculations (MAPLE), charge distribution (CHARDI), and bondvalence sum calculations (BVS). The compounds RE 3 [Si 5 N 9 O] (RE = Dy-Er, Yb) crystallize in the orthorhombic space group [a] 731 Pbcm (no. 57) (Z = 4) with the following lattice parameters: Dy 3 [Si 5 N 9 O]: a = 4.9865(3), b = 16.1633(9), and c = 10.6651(6) Å; Ho 3 [Si 5 N 9 O]: a = 4.9758(3), b = 16.1332(7), and c = 10.6312(5) Å; Er 3 [Si 5 N 9 O]: a = 4.9682(2), b = 16.1029(5), and c = 10.5995(3) Å; Yb 3 [Si 5 N 9 O]: a = 4.9473(2), b = 16.0622(5), and c = 10.5431(4) Å.The four isotypic compounds consist of a network of corner sharing SiN 4 and SiN 3 O tetrahedra. N [2] and N [3] interconnecting nitrogen atoms build five-membered rings, hosting the rare earth cations.These structural properties lead to rigid arrangements, which make nitrogen-containing silicates interesting compounds for hosting activator ions towards luminescent materials for the application in pc-LEDs, e.g., in M 3 [Si 6 N 2 O 12 ]:Eu 2+ (M = Ba, Sr), [13] Ba 2 [Si 5 N 8 ]:Eu 2+ , [14] Sr[Mg 3 SiN 4 ]:Eu 2+ , [15] Lu 4 Ba 2 [Si 9 N 16 O]O:Eu 2+ , and Y 4 Ba 2 [Si 9 N 16 O]O:Eu 2+ . [12] A large number of oxonitridosilicates also form structures solely with rare earth cations, such as