Extinction depth in a smooth X-ray waveguide

Ognev, L. I.

doi:10.1134/s1063784215100242

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2017

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Cited by 2 publications

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“…where d e is the effective channel width, comprised of the channel width d measured by an SEM tool and the penetration depth d p [68], such that d e = d + 2 · d p [69]. For E ph = 7.9 keV, the penetration depth…”

Section: Gratingsmentioning

confidence: 99%

X-ray waveguide optics

Hoffmann-Urlaub¹

2017

Göttingen Series in X-Ray Physics

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Section: Gratingsmentioning

confidence: 99%

X-ray waveguide optics

Hoffmann-Urlaub¹

2017

Göttingen Series in X-Ray Physics

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“…where d e is the effective channel width, comprised of the channel width d measured by an SEM tool and the penetration depth d p [68], such that d e = d + 2 • d p [69]. For E ph = 7.9 keV, the penetration depth 3 d p = λ/(2πθ c ) is 6.3 nm.…”

Section: Gratingsmentioning

confidence: 99%

X-ray waveguide optics: Beyond straight channels

Hoffmann-Urlaub¹

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This paper reports on the fabrication of X-ray waveguides, manufactured by e-beam lithography, reactive ion etching and wafer bonding techniques. By combination of these processing steps, long empty (air) channels with cross-sections in the range of 10 to 100 nm are obtained, forming a guiding layer, surrounded by a solid state cladding. Aside from silicon, we present also waveguide channels fabricated in germanium and quartz. The improved fabrication protocols lead to significantly enhanced exit flux for imaging applications. Finally, we address not only straight channels, but a large variety of various geometries, as required for different applications.

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Extinction depth in a smooth X-ray waveguide

Cited by 2 publications

References 7 publications

X-ray waveguide optics

X-ray waveguide optics

X-ray waveguide optics: Beyond straight channels

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