1998
DOI: 10.1016/s0169-4332(97)00754-x
|View full text |Cite
|
Sign up to set email alerts
|

Excimer laser ablation of Y-SiAlON

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

0
4
0

Year Published

2003
2003
2023
2023

Publication Types

Select...
7

Relationship

0
7

Authors

Journals

citations
Cited by 11 publications
(4 citation statements)
references
References 2 publications
0
4
0
Order By: Relevance
“…Yttrium stabilized Si-Al-O-N (Y-sialon) was irradiated by an Kr-F-excimer laser at a fluence of 850 mJ/cm 2 , pulse repetition rate varying from 2 to 20 Hz and by applying different number of pulses. 73 The material removal in Y-sialon under the above processing conditions was by ablation. The variation of ablation depth and a Y-sialon sample ablated by laser irradiation is presented in Fig.…”
Section: Ablationmentioning
confidence: 99%
“…Yttrium stabilized Si-Al-O-N (Y-sialon) was irradiated by an Kr-F-excimer laser at a fluence of 850 mJ/cm 2 , pulse repetition rate varying from 2 to 20 Hz and by applying different number of pulses. 73 The material removal in Y-sialon under the above processing conditions was by ablation. The variation of ablation depth and a Y-sialon sample ablated by laser irradiation is presented in Fig.…”
Section: Ablationmentioning
confidence: 99%
“…At the edge region of the groove some white debris is visible for both SiAlON types. This can be attributed to Si3N4-decomposition and Si-oxidation [ 18 ] as the laser ablation experiment was performed in ambient atmosphere. For the latter the chemical reaction can be described according to: …”
Section: Resultsmentioning
confidence: 99%
“…In the case of LKT 550 high and orthogonal irradiation angle lead to high Ra values. This can be explained by the high leading to re-condensation, Si3N4-decomposition and Si-oxidation [ 18 ]. Low Ra values are measured for the quasi-tangential laser irradiation.…”
Section: Resultsmentioning
confidence: 99%
“…Insufficiently high value of thermal conduction coefficient of Si 3 N 4 ceramics leads to occurrence of the high temperature gradients in its surface layer at laser processing [3]. The high thermal stresses leading to fracture of nitride ceramic details are formed under the influence of these gradients [4]. Therefore an actual scientific task is studying of thermomechanical mechanism of chance failure of the nitride ceramic details under the action of the intensive heat flow [5].…”
Section: Introductionmentioning
confidence: 99%