Evolution of the electron energy distribution function in a planar inductive argon discharge

Abstract

Articles you may be interested inLow energy electron heating and evolution of the electron energy distribution by diluted O 2 in an inductive Ar / O 2 mixture discharge Evolution of an electron energy distribution function in a weak dc magnetic field in solenoidal inductive plasmaThe evolution of the electron energy distribution function ͑EEDF͒ over a pressure range of 5-100 mTorr is investigated in a planar inductive argon discharge. It is found that the EEDF, which appears to be a bi-Maxwellian distribution with a two-temperature structure at low pressures, evolves into a Druyvesteyn-like distribution as the pressure increases. The electron energy diffusion coefficient, which describes electron heating, is calculated under the same discharge conditions using discharge parameters and numerical results show that the heating of low-energy electrons is enhanced as the pressure increases resulting in a transition of the EEDF to a Druyvesteyn distribution.

New collective trampoline mechanism of accelerated ion-plasma sputtering

“…This fact may be explained by a substantial pressure rise in this regime, so that the electron distribution function shifts to smaller energies (the pressure influence on the electron distribution function was indeed found in the discharge plasma [112][113][114][115]). Then, the probability of Ar atom excitation decreases [116].…”

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“…Two argon lines at 750. 4 required to reach the excited level to carry out the said transition) and 811.5 nm  = E 2p 1s ; 13.08 eV 9 5 th ( ) have been selected to observe the relation between electron density and emission intensity. By monitoring the excitation of these lines, as a function of discharge parameters, one can estimate the variation in n e and T e .…”

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“…The "bi-Maxwellian" EEDF is divided into two regions according to electron energy, with the low energy or "bulk" electron group and higher energy "tail" of the distribution characterised by two-temperatures. 20,21 The Druyvesteyn EEDF predicts more electrons with low energy and fewer electrons at higher energies compared to the Maxwell energy distribution. 22 Magnetic pole enhanced inductively coupled plasma (MaPE-ICP) source is designed for large area plasma generation with high plasma uniformity as well as low ion energy.…”