2014
DOI: 10.7566/jpscp.1.015071
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Abstract: The hetero-integration of the micro-fluidic device and the optical fiber is realized. Since the micro-fluidic device and the optical fiber are different in their production methods, the assembly method becomes essential. The technique reported for the telecom communication of the optical switch does not become the solution requiring some improvement. A new bias spring with reverse taper is proposed and realized with the control of Si etching profile. The higher transmission ratio of the light is confirmed. Th…

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