Erratum to: Guidelines for tilt measurements realized by MEMS accelerometers

Łuczak, Sergiusz

doi:10.1007/s12541-014-0558-8

Cited by 9 publications

(4 citation statements)

References 14 publications

(30 reference statements)

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“…However, assuming such repeatable calibration, it must not be forgotten that alignment precision, being a crucial issue pertaining to application of MEMS accelerometers, especially with respect to their calibration accuracy [47], may be also a subject to aging processes. Alignment precision is a matter of great importance in the case of determining tilt angles [48], especially while striving for high accuracy of the measurements [49], as proved e.g. by result of experimental studies reported in [50].…”

Section: Discussionmentioning

confidence: 99%

Effects of Natural Aging in Biaxial MEMS Accelerometers

2021

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Effects of a fully natural aging of MEMS accelerometers are evaluated with regard to changes in their performance. Two models of commercial dual-axis accelerometers (two pieces of ADXL 202E and 203 by Analog Devices Inc.) with analog outputs were tested over a period of about 10 and 4 years, respectively. A custom computer controlled test rig was used for performing relevant experimental studies, employing the gravitational acceleration as the reference source. A methodology of determining the proposed indicators of aging phenomena is presented and discussed. Changes of the offset voltage and the scale factor were observed and a way of evaluating the overall error due to combined influence of these two parameters is proposed. It was found out that the changes of the output voltage generated by the tested accelerometers were considerable, resulting in respective maximal errors of about 52 mg (2.6%) (ADXL 202E) or 20 mg (1%) (ADXL 203). Simple ways of reducing the effects of aging are proposed.

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Section: Discussionmentioning

confidence: 99%

Effects of Natural Aging in Biaxial MEMS Accelerometers

2021

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“…Using data of the most sensitive element at any position, an accurate measurement of tilt in the whole range will be achieved accordingly. Łuczak gave the concept of tilt measurement systems utilizing multi-axial accelerometers [ 18 ], and disscussed application of arc tangent function, which can also ensure a constant sensitivity of tilt measurement [ 19 ]. Enfu Li et al achieved a tilt sensor with a high resolution maintained in the full measurement range based on one dual-axis micro-accelerometer [ 20 ].…”

Section: Sensing Principle and Structure Designmentioning

confidence: 99%

A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0∘ to 360∘

Wang

Wei

Weng

et al. 2018

Sensors

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In this paper, a novel single-axis MEMS tilt sensor is presented. It contains a hexagonal proof mass, six micro-lever force amplifiers and three double-ended-tuning fork (DETF) resonant strain gauges. The proof mass is placed in the center with the micro-levers and the DETFs radially arrayed around. The variation of gravity acceleration applied on the proof mass will result in frequency shifts of the DETFs. Angular tilt can be got by analyzing the frequency outputs. The structural design of the tilt sensor is optimized by finite element simulation and the device is microfabricated using a silicon-on-insulator process, followed by open-loop and closed-loop characterizations. Results show that the scale factor of such sensor is at least 11.53 Hz/degree. Minimum Allan deviation of the DETF oscillator is 220 ppb (parts per billion) of the resonant frequency for an 5 s integration time. Resolution of the tilt sensor is 0.002∘ in the whole measurement range from 0∘ to 360∘.

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“…They are also successful sensors for various environmental monitoring uses. MEMS inclination sensors are widely used in buildings, bridges, power transmission networks, automobiles, and other engineering vehicles [ 1 , 2 ]. Accelerometers with high performance and high reliability have great market value.…”

Section: Introductionmentioning

confidence: 99%

A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost

Han

et al. 2022

Micromachines

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High-performance MEMS accelerometers usually use a pendulum structure with a larger mass. Although the performance of the device is guaranteed, the manufacturing cost is high. This paper proposes a method of fabricating high-performance MEMS accelerometers with a TGV process, which can reduce the manufacturing cost and ensure the low-noise characteristics of the device. The TGV processing relies on laser drilling, the metal filling in the hole is based on the casting mold and CMP, and the packaging adopts the three-layer anodic bonding process. Moreover, for the first time, the casting mold process is introduced to the preparation of MEMS devices. In terms of structural design, the stopper uses distributed comb electrodes for overload displacement suppression, and the gas released by the packaging method provides excellent mechanical damping characteristics. The prepared accelerometer has an anti-overload capability of 10,000 g, the noise density is less than 0.001°/√Hz, and it has ultra-high performance in tilt measurement.

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Erratum to: Guidelines for tilt measurements realized by MEMS accelerometers

Cited by 9 publications

References 14 publications

Effects of Natural Aging in Biaxial MEMS Accelerometers

Effects of Natural Aging in Biaxial MEMS Accelerometers

A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0∘ to 360∘

A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost

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