“…296,297 Several routes now exist for the epitaxial integration of functional oxides with semiconductors including (001) Si,196,204,205,210, 226,[313][314][315] Using these routes a multitude of functional oxides, with conducting top and bottom electrodes when desired, have been epitaxially integrated with semiconductor materials. 196,198,204,205,225,226,298,299,301,304,[307][308][309]313,314,[316][317][318][319][320][321][322][323][324][325][326] This capability could play a significant role in future hybrid devices.…”