Thomson and Nielsen TN-502 RD MOSFETs were used for entrance dose in vivo dosimetry for 6 and 10 MV photons. A total of 24 patients were tested, 10 breast, 8 prostate, 5 lung and 1 head and neck. For prostates three fields were checked. For all other plans all fields were checked. An action threshold of 8% was set for any one field and 5% for all fields combined. The total number of fields tested was 56, with a mean discrepancy of 1.4% and S.D. of 2.6%. Breasts had a mean discrepancy of 1.8% and S.D. of 2.8%. Prostates had a mean discrepancy of 1.3% and S.D. of 2.9%. For 3 fields combined, prostates had a mean of 1.3% and S.D. of 1.8%. These results are similar to results obtained with diodes and TLDs for the same techniques.