Enhancing the p-type conductivity of pure phase SnO via stoichiometry control and annealing

Kwok, Cheuk Kai Gary; Wang, Ying; Egbo, Kingsley O.; Hossain, Mohammad K.; Shil, Sujit Kumer; Yu, K. M.

doi:10.1016/j.surfin.2022.102473

Search citation statements

Order By: Relevance

Paper Sections

Select...

Introduction1

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2023

Publication Types

Select...

Article2

Relationship

Self Cite0

Independent2

Authors

Journals

Cited by 2 publications

(1 citation statement)

References 46 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The deposition of thin films using magnetron sputtering enables the deposition of a material under many different conditions [1][2][3][4][5], allowing for control of the stoichiometry of composite materials [6][7][8][9][10]. This allows for the production of materials with a wide range of optical properties [11][12][13][14][15].…”

Section: Introductionmentioning

confidence: 99%

Optical Properties in Mid-Infrared Range of Silicon Oxide Thin Films with Different Stoichiometries

Herguedas,

Carretero

2023

Nanomaterials

View full text Add to dashboard Cite

SiOx thin films were prepared using magnetron sputtering with different O2 flow rates on a silicon substrate. The samples were characterized using Fourier transform infrared spectroscopy in transmission and reflection, covering a spectral range of 5 to 25 μm. By employing a multilayer model, the values of the complex refractive index that best fit the experimental transmission and reflection results were optimized using the Brendel–Bormann oscillator model. The results demonstrate the significance of selecting an appropriate range of O2 flow rates to modify the SiOx stoichiometry, as well as how the refractive index values can be altered between those of Si and SiO2 in the mid-infrared range.

show abstract