Enhancement of Life Time of the Dimensionally Stable Anode for Copper Electroplating Applications

Abstract

In order to enhance the long-term stability of DSA for copper electroplating process, in the present study, noble metal oxides with excellent electrochemical properties was used and optimum condition was determined the ratio of noble metal oxides, surface pre-treatment of titanium substrate and heat treatment. The effect of the surface pretreatment of titanium substrate and ratio of noble metal oxides were estimated by accelerated test at the highly current density conditions. The lifetime of DSA increase six-fold higher as the oxide thickness of Ta 7 : Ir 3 composition ratio. Under the optimal condition, surface pretreatment led to dramatic increase in the lifetime of DSA.

Electrochemical comparative study of Ti/Ta2O5/Pt‐RuO2‐IrO2 and Ti/Ta2O5/Pt anodes: Stability, service lifetime, and electrooxidation performance

“…Tantalum used in combination or as a precoat has the effect of improving the stability of the electrode. 40 The presence of Ta 2 O 5 would slow the detachment of the Pt deposit from the surface of the support.…”

Archives of Metallurgy and Materials

“…It was generally known that electroplating performance and long lifetime of the DSe could be determined by manufacturing process conditions such as component, composition, coating layer thickness, and heat treatment of the mixed metal oxide [3,4]. In addition, the study has been conducted that the durability of DSe can be greatly improved by using the process of surface pre-treatment on the titanium plate and then coating of and then metal oxide coating [5,6]. In general, the lifetime of DSe is from several months to several years, it is necessary to study DSe lifetime evaluation for a short-term through harsher process conditions than actual electrochemical conditions [7].…”