Enhanced dielectric properties in bismuth-doped alumina films prepared by atomic layer deposition

Li, Y.W.; Qiao, Qi; Dong, Zhenhua; Zhang, J.Z.; Hu, Zhigao; Chu, Junhao

doi:10.1016/j.jnoncrysol.2016.04.001

Cited by 4 publications

(1 citation statement)

References 18 publications

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“…like milling of stainless steel 3 . Amorphous and corundum-structure aluminum oxide both have important use as dielectric material for microelectronics and GHz data communication [4][5][6][7][8] . The thermodynamically stable phase is corundum, with a rhombohedral crystal structure (α-Al2O3, space group R3c 9 ), and has been widely used within the cutting tool industry since the beginning of the 1990's (first use in the 1970's) 3 .…”

Section: Introductionmentioning

confidence: 99%

Influence of Si doping and O2 flow on arc-deposited (Al,Cr)2O3 coatings

Landälv

Göthelid

Jensen

et al. 2019

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Al,Cr)2O3 coatings with Al/(Al+Cr) = 0.5 or Al = 70 at.%, doped with 0, 5 or 10 at.% Si, were deposited on hard metal and Si(100) substrates to elucidate the influence of Si on the resulting coatings. The chemical analysis of the coatings showed between 3.3 and 7.4 at.% metal fraction Si incorporated into all studied coatings depending on cathode Si-composition. The incorporated Si content does not change significantly with different oxygen flow covering a wide range of deposition conditions from low to high O2 flow during growth. The addition of Si promotes the metastable B1-like cubic structure over the thermodynamically stable corundum structure. The hardness determined by nanoindentation of the as-deposited coatings is slightly reduced upon Si-incorporation as well as upon increased Al-content. Si is found enriched in droplets but can also be found at a lower content, evenly spread, without visible segregation on the ~5 nm scale, in the actual oxide coating. The positive effect of improved cathode erosion upon Si-incorporation has to be balanced against the promotion of the metastable B1-like structure, having lower room temperature hardness and inferior thermal stability compared to the corundum structure.

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