2015
DOI: 10.1149/2.0141602jss
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Enhanced Adhesive Bonding Based on Surface Modification with Silicon Nanowire Arrays

Abstract: Adhesive bonding is one of the methods extensively used for 3D packaging, which has many advantageous features except for relatively poor bonding strength. In this paper, we present a novel method to strengthen adhesive bonding via modifying the wafer surface with silicon nanowire (SiNW) arrays. The SiNW was synthesized using a micro-electrochemical wet etching method. The nanostructure was characterized and its formation process was revealed in detail. Contact angle measurement and the observation of wetting … Show more

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Cited by 4 publications
(2 citation statements)
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“…An enhancement of the bonding strength can be achieved by surface modifications of silicon in the nanoscale. Surface enlargement and additional form fit affect adhesive bond strength and ductility of the interface [12,13]. Plasma etching of the silicon surface generates nanostructures by self-masking, the so-called black silicon [14].…”
Section: Introductionmentioning
confidence: 99%
“…An enhancement of the bonding strength can be achieved by surface modifications of silicon in the nanoscale. Surface enlargement and additional form fit affect adhesive bond strength and ductility of the interface [12,13]. Plasma etching of the silicon surface generates nanostructures by self-masking, the so-called black silicon [14].…”
Section: Introductionmentioning
confidence: 99%
“…It was 200 times slower than a RMS-foil with the same characteristics and the slower propagation was attributed to a reduction of the heat transfer due to the thermal resistances at the particle-particle interfaces [17,19]. Nanostructured Si has interesting properties such as surface enlargement that can be exploited in chip assembly [20]. For this reason, it was used as a substrate during the deposition of Al/Ni RMS [18].…”
Section: Introductionmentioning
confidence: 99%