Emission and absorption spectroscopy study of Ar excited states in 13.56MHz argon plasma operating at sub-atmospheric to atmospheric pressure

Li, L; Nikiforov, Anton; Britun, Nikolay; Snyders, Rony; Leys, Christophe

doi:10.1016/j.sab.2015.02.016

Cited by 13 publications

(8 citation statements)

References 34 publications

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“…50 In such motion-limited discharges, the contribution of the VDF shape to the final line broadening is dominant (including the thermalized case, i.e., the Doppler broadening), whereas the other broadening mechanisms are negligible. 51 The other broadenings mechanisms such as resonant, Stark, or Van der Vaals broadening become essential only at high pressure, 52 which is out of scope of this paper.…”

Section: On the Velocity Distribution Function In Hipimsmentioning

confidence: 99%

Particle visualization in high-power impulse magnetron sputtering. I. 2D density mapping

Britun

Palmucci

Konstantinidis

et al. 2015

Journal of Applied Physics

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Time-resolved characterization of an Ar-Ti high-power impulse magnetron sputtering discharge has been performed. This paper deals with two-dimensional density mapping in the discharge volume obtained by laser-induced fluorescence imaging. The time-resolved density evolution of Ti neutrals, singly ionized Ti atoms (Ti þ ), and Ar metastable atoms (Ar met ) in the area above the sputtered cathode is mapped for the first time in this type of discharges. The energetic characteristics of the discharge species are additionally studied by Doppler-shift laser-induced fluorescence imaging. The questions related to the propagation of both the neutral and ionized discharge particles, as well as to their spatial density distributions, are discussed. V C 2015 AIP Publishing LLC.

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Section: On the Velocity Distribution Function In Hipimsmentioning

confidence: 99%

Particle visualization in high-power impulse magnetron sputtering. I. 2D density mapping

Britun

Palmucci

Konstantinidis

et al. 2015

Journal of Applied Physics

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“…Sub‐atmospheric discharge has been attracting great attention due to its valuable applications in many fields such as material processing, biological, and medical treatments . Most existing sub‐atmospheric discharges, including dielectric barrier discharge, capacitive discharge and cascaded arc, however, involve direct contact between plasma and electrode, which results in low energy efficiency and short life span because of the formed plasma sheath on the surface of electrode . Therefore, it is of practical interest to explore new discharge scheme that has no contact between plasma and electrode and can work efficiently in sub‐atmospheric environment.…”

Section: Introductionmentioning

confidence: 99%

A novel antenna for sub‐atmospheric radio‐frequency discharge

Chang

Yuan

et al. 2020

Contributions to Plasma Physics

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A novel antenna that can generate plasma efficiently for pressure up to thousands of Pascal with 1 kW-13.56 MHz radio-frequency power supply is reported. It consists of two isolated solenoids so that involves both capacitively coupling and inductively coupling effects, together with magnetic mirror effect which confines the formed plasma axially to a certain extent. Experiments show that the novel discharge has directional preference depending on the applied voltage, a character of dielectric barrier discharge, and can run steadily for tens of hours without severe thermal load. Simulations using COMSOL Multiphysics reveal consistent variations of electron temperature and electron density with base pressure, input power, separation distance of isolated solenoids, and the number of turns of each solenoid. This ionization method is of great interest for plasma processing and propulsion in sub-atmospheric environment. K E Y W O R D Splasma processing, plasma propulsion, RF discharge, sub-atmospheric

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“…The line absorption profile induced by Van der Waals contribution has the Lorentzian shape, and its FWHM (Δ ν VAN in s −1 ) can be expressed as

normalΔ ν_{VAN} = C_{1} \cdot N_{gas}

where C 1 = 3 × 10 16 ν 0 2 C 0.4 ( T gas / µ ) 0.6 is the unit of cm 3 s −1 , N gas is the neutral (ground state) density in cm −3 , and µ is the reduced mass (in amu) of nitrogen, i.e., is 14.0067/2 = 7.00335. Further, the width (FWHM) of the resonance broadening is given by

normalΔ ν_{VAN} \approx C_{2} \cdot N_{gas}

where C 2 = 8.62 × 10 −29 ν 0 2 ν res f osc √( g 2 / g 1 ).c is the unit in cm 3 s −1 .…”

Section: Methodsmentioning

confidence: 99%

“…In Equation (5), the Gaussian contribution (Dn G ) can be evaluated by the familiar expression Dn G ¼ 7.16 Â 10 À7 n 0 √(T gas /M). [18,23,24] Here, T gas is the gas temperature, M (amu) is the atomic mass of the radiating (radical) species in the plasmas, and v 0 is the central frequency of the absorption line. Further, knowing the gas pressure and concentration of the neutrals, the Lorentzian contribution (Dn L ) of the Voigt profile (FWHM) can be calculated.…”

Section: Vuvas and Oesmentioning

confidence: 99%

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Nitrogen Radical and Plasma Diagnostics in Dual Frequency Hybrid Plasmas to Investigate N₂/SiH₄ PECVD Process

Sahu

Han

Shin

et al. 2015

Plasma Processes & Polymers

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The present work addresses a systematic approach for measuring the atomic nitrogen radicals using vacuum ultraviolet absorption spectroscopy (VUVAS) in the N 2 -SiH 4 PECVD processes using alternate plasma concepts. Measurements using VUVAS and RF compensated Langmuir probe reveal that there is significant enhancement in the radical and plasma density when the discharge is operated using the dual frequency hybrid source using the combination of a lowand a very highfrequency source. The behavior of low frequency and dual frequency capacitively coupled plasma (CCP) discharges is experimentally investigated. This study also presents a detailed analysis and effectiveness of the dual frequency hybrid plasmas for the practical applications.

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Emission and absorption spectroscopy study of Ar excited states in 13.56MHz argon plasma operating at sub-atmospheric to atmospheric pressure

Cited by 13 publications

References 34 publications

Particle visualization in high-power impulse magnetron sputtering. I. 2D density mapping

Particle visualization in high-power impulse magnetron sputtering. I. 2D density mapping

A novel antenna for sub‐atmospheric radio‐frequency discharge

Nitrogen Radical and Plasma Diagnostics in Dual Frequency Hybrid Plasmas to Investigate N₂/SiH₄ PECVD Process

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Emission and absorption spectroscopy study of Ar excited states in 13.56MHz argon plasma operating at sub-atmospheric to atmospheric pressure

Cited by 13 publications

References 34 publications

Particle visualization in high-power impulse magnetron sputtering. I. 2D density mapping

Particle visualization in high-power impulse magnetron sputtering. I. 2D density mapping

A novel antenna for sub‐atmospheric radio‐frequency discharge

Nitrogen Radical and Plasma Diagnostics in Dual Frequency Hybrid Plasmas to Investigate N2/SiH4 PECVD Process

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Product

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Nitrogen Radical and Plasma Diagnostics in Dual Frequency Hybrid Plasmas to Investigate N₂/SiH₄ PECVD Process