2006
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Abstract: We have developed ultra-flat carbon film electrodes with a wide potential window and a low capacitive current by the electron cyclotron resonance (ECR) sputtering method. The film consists of sp2 and sp3 bonds (sp3/sp2 ratio = 0.702) and is sufficiently conductive for electrochemical measurements without doping. The film has average roughness of 0.7 A, which is much flatter than that of nanocrystalline diamond film. The potential limit of ECR sputtered carbon (current limit < +/-500 muA/cm2) in the positive di… Show more

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