1992
DOI: 10.1126/science.255.5046.830
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Electrical Transport Properties of Undoped CVD Diamond Films

Abstract: Polycrystalline diamond films synthesized by microwave-assisted chemical vapor deposition (MACVD) were examined with transient photoconductivity, and two fundamental electrical transport properties, the carrier mobility and lifetime, were measured. The highest mobility measured is 50 centimeters squared per volt per second at low initial carrier densities (<10(15) per cubic centimeter). Electron-hole scattering causes the carrier mobility to decrease at higher carrier densities. Although not measured directly,… Show more

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Cited by 56 publications
(15 citation statements)
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“…First, structural defects in the BP film like those caused by the lattice mismatch with the Si substrate, differences between the coefficients of thermal expansion for Si and BP, or possibly the mosaic-spread of the BP thin-film, may affect the electronic properties of the film [ 15,20,21]. Secondly, short trapping lifetimes may be produced by deep level electronic , , states in the BP arising from small concentrations of impurities [ 14,221 or shallow-level traps produced by deviations in stochiometry from mono-boron-phosphide [22].…”
Section: Scientific Approach and Resultsmentioning
confidence: 99%
“…First, structural defects in the BP film like those caused by the lattice mismatch with the Si substrate, differences between the coefficients of thermal expansion for Si and BP, or possibly the mosaic-spread of the BP thin-film, may affect the electronic properties of the film [ 15,20,21]. Secondly, short trapping lifetimes may be produced by deep level electronic , , states in the BP arising from small concentrations of impurities [ 14,221 or shallow-level traps produced by deviations in stochiometry from mono-boron-phosphide [22].…”
Section: Scientific Approach and Resultsmentioning
confidence: 99%
“…Currently, in spite of the general appeal of synthetic diamond for UV detection, Chemical Vapor Deposition (CVD) growth techniques lead to polycrystalline films with a relatively high concentration of grain boundaries and crystal defects, which affect their photoconductive properties [7,8]. The phase purity, the sample preferential orientation [9] and the concentration of crystallographic [10] defects give rise to localized electronic states within gap and, consequentially, short carrier lifetime, poor mobility and collection lengths.…”
Section: Introductionmentioning
confidence: 99%
“…The diamond is characterized by exceptional mechanical, thermal, optical properties and excellent electrical properties such as a high carrier mobility and high breakdown voltage [1,2]. Nowadays, due to the fast development of diamond synthesis from vapor phase, growing diamonds of desired quality and reproducibility became possible.…”
Section: Introductionmentioning
confidence: 99%